Compositionally asymmetric tri-color superlattlces grown by pulsed laser deposition

H. N. Lee, H. M. Christen, C. M. Rouleau, S. Senz, S. K. Lee, D. Hesse, D. H. Lowndes

Research output: Contribution to journalConference articlepeer-review

Abstract

Compositionally asymmetric tri-color superlattices (TCS) with a combination of BaTiO3/SrTiO3/CaTiO3 have been grown by pulsed laser deposition (PLD) on atomically-flat SrRuO3-covered (001) SrTiO3 substrates. Conducting SrRuO3 films with single-terrace steps that closely mimic those of the SrTiO3 substrate also were grown by PLD and serve as bottom electrodes. In order to achieve atomic control of each layer, we have calibrated precisely the number of laser pulses required to grow one unit-cell-thick layers (-200 for a laser spot of 0.4 mm2). These conditions allowed recording of pronounced oscillations of the reflection high-energy electron diffraction (RHEED) specular spot intensity over the entire growth run - even for TCS layers totaling more than 1000 run in total thickness.

Original languageEnglish
Pages (from-to)127-131
Number of pages5
JournalMaterials Research Society Symposium - Proceedings
Volume784
StatePublished - 2003
EventFerroelectric Thin Films XII - Boston, MA, United States
Duration: Dec 1 2003Dec 4 2003

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