Composition and Microstructure of Chemically Vapor‐Deposited Boron Nitride, Aluminum Nitride, and Boron Nitride + Aluminum Nitride Composites

John A. Hanigofsky; Karren L. More; W. J. Lackey; Woo Y. Lee; Garth B. Freeman

doi:10.1111/j.1151-2916.1991.tb06879.x

Composition and Microstructure of Chemically Vapor‐Deposited Boron Nitride, Aluminum Nitride, and Boron Nitride + Aluminum Nitride Composites

John A. Hanigofsky, Karren L. More, W. J. Lackey, Woo Y. Lee, Garth B. Freeman

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

The composition and microstructure of dispersed‐phase ceramic composites containing BN and AIN as well as BN and AIN single‐phase ceramics prepared by chemical vapor deposition have been characterized using X‐ray diffraction, scanning electron microscopy, electron microprobe, and transmission electron microscopy techniques. Under certain processing conditions, the codeposited coating microstructure consists of small single‐crystal AIN fibers (whiskers) surrounded by a turbostratic BN matrix. Other processing conditions resulted in single‐phase films of AIN with a fibrous structure. The compositions of the codeposits range from 2 to 50 mol% BN, 50 to 80 mol% AIN with 7% to 25% oxygen impurity as determined by electron microprobe analysis.

Original language	English
Pages (from-to)	301-305
Number of pages	5
Journal	Journal of the American Ceramic Society
Volume	74
Issue number	2
DOIs	https://doi.org/10.1111/j.1151-2916.1991.tb06879.x
State	Published - Feb 1991
Externally published	Yes

Keywords

aluminum nitride
boron nitride
chemical vapor deposition
composites
microstructure

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10.1111/j.1151-2916.1991.tb06879.x

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title = "Composition and Microstructure of Chemically Vapor‐Deposited Boron Nitride, Aluminum Nitride, and Boron Nitride + Aluminum Nitride Composites",

abstract = "The composition and microstructure of dispersed‐phase ceramic composites containing BN and AIN as well as BN and AIN single‐phase ceramics prepared by chemical vapor deposition have been characterized using X‐ray diffraction, scanning electron microscopy, electron microprobe, and transmission electron microscopy techniques. Under certain processing conditions, the codeposited coating microstructure consists of small single‐crystal AIN fibers (whiskers) surrounded by a turbostratic BN matrix. Other processing conditions resulted in single‐phase films of AIN with a fibrous structure. The compositions of the codeposits range from 2 to 50 mol% BN, 50 to 80 mol% AIN with 7% to 25% oxygen impurity as determined by electron microprobe analysis.",

keywords = "aluminum nitride, boron nitride, chemical vapor deposition, composites, microstructure",

author = "Hanigofsky, {John A.} and More, {Karren L.} and Lackey, {W. J.} and Lee, {Woo Y.} and Freeman, {Garth B.}",

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AU - Hanigofsky, John A.

AU - More, Karren L.

AU - Lackey, W. J.

AU - Lee, Woo Y.

AU - Freeman, Garth B.

PY - 1991/2

Y1 - 1991/2

N2 - The composition and microstructure of dispersed‐phase ceramic composites containing BN and AIN as well as BN and AIN single‐phase ceramics prepared by chemical vapor deposition have been characterized using X‐ray diffraction, scanning electron microscopy, electron microprobe, and transmission electron microscopy techniques. Under certain processing conditions, the codeposited coating microstructure consists of small single‐crystal AIN fibers (whiskers) surrounded by a turbostratic BN matrix. Other processing conditions resulted in single‐phase films of AIN with a fibrous structure. The compositions of the codeposits range from 2 to 50 mol% BN, 50 to 80 mol% AIN with 7% to 25% oxygen impurity as determined by electron microprobe analysis.

AB - The composition and microstructure of dispersed‐phase ceramic composites containing BN and AIN as well as BN and AIN single‐phase ceramics prepared by chemical vapor deposition have been characterized using X‐ray diffraction, scanning electron microscopy, electron microprobe, and transmission electron microscopy techniques. Under certain processing conditions, the codeposited coating microstructure consists of small single‐crystal AIN fibers (whiskers) surrounded by a turbostratic BN matrix. Other processing conditions resulted in single‐phase films of AIN with a fibrous structure. The compositions of the codeposits range from 2 to 50 mol% BN, 50 to 80 mol% AIN with 7% to 25% oxygen impurity as determined by electron microprobe analysis.

KW - aluminum nitride

KW - boron nitride

KW - chemical vapor deposition

KW - composites

KW - microstructure

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Composition and Microstructure of Chemically Vapor‐Deposited Boron Nitride, Aluminum Nitride, and Boron Nitride + Aluminum Nitride Composites

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Keywords

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