Abstract
In this work, we use electrolytic copper foils as substrates for the deposition of graphene by chemical vapor deposition. We investigate the effects of preannealing conditions, methane injection time, and temperature to synthesize graphene with a similar quality as when grown on cold-rolled copper. We find that the electrolytic copper foil’s annealing conditions and CH4 injection temperature determine the quality of graphene.
Original language | English |
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Article number | 024002 |
Journal | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
Volume | 42 |
Issue number | 2 |
DOIs | |
State | Published - Mar 1 2024 |
Externally published | Yes |
Funding
The authors acknowledge the Cooperative Equipment Center at KOREATECH for their support with (micro-)structural analysis. A.C. is grateful for financial support to the Korea University of Technology and Education (KOREATECH) and the Research and Education Program in 2022.