Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition

Woo Jin Lee, Sang Ho Kim, Jun Sun Eom, Arnaud Caron

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

In this work, we use electrolytic copper foils as substrates for the deposition of graphene by chemical vapor deposition. We investigate the effects of preannealing conditions, methane injection time, and temperature to synthesize graphene with a similar quality as when grown on cold-rolled copper. We find that the electrolytic copper foil’s annealing conditions and CH4 injection temperature determine the quality of graphene.

Original languageEnglish
Article number024002
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume42
Issue number2
DOIs
StatePublished - Mar 1 2024
Externally publishedYes

Funding

The authors acknowledge the Cooperative Equipment Center at KOREATECH for their support with (micro-)structural analysis. A.C. is grateful for financial support to the Korea University of Technology and Education (KOREATECH) and the Research and Education Program in 2022.

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