Abstract
A comparative study of ArF-and KrF-laser generated carbon plasmas has been performed under PLD conditions of amorphous diamond-like carbon (DLC) films. Gated-ICCD species-resolved imaging, luminescence spectroscopy and ion probe diagnostics have revealed distinct differences between the carbon plumes generated by ArF-and KrF-lasers. KrF-laser (6.7 J/cm 2 ) irradiation produces a less energetic carbon plasma containing larger amounts of luminescent C 2 compared with ArF-laser ablation at the same energy fluence. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si〈100〉 and NaCl substrates were utilized to characterize the high quality ArF-and KrF-laser deposited films (up to 84% of sp 3 bonded carbon for 7 J/cm 2 ArF-laser DLC film). The more energetic and highly-atomized ArF-laser carbon plasma appears to be responsible for the better diamond-like properties.
| Original language | English |
|---|---|
| Pages (from-to) | 859-865 |
| Number of pages | 7 |
| Journal | Applied Surface Science |
| Volume | 96-98 |
| DOIs | |
| State | Published - Apr 1996 |
Funding
Science, Oak Ridge National Laboratory, managed by Lockheed Martin Energy Research, for the U.S. Department of Energy, under contract DE-ACOS-960R22464, and NIS/IPP program sponsored by Division of Defense Programs, U.S. Departement of Energy under contract DP-15. The authors gratefully acknowledge Cambridge Research and Instrumentation, Inc. for the use of the tunable optical filter and also many helpful discussions with S.J. Pennycook and D.H. Lowndes. This research was sponsored by the Division of Materials 574 4814; e-mail: [email protected]. ’ This paper has been authored by a contractor of the U.S. Governmentu nder contract No. DE-ACW960R22464.A ccord-ingly, the U.S. Government retains a nonexclusive, royalty-free license to publish or reproduce the published form of this contri-bution, or allow others to do so, for U.S. Government purposes. ’ Prepared by Solid State Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 378316056. Managed by Lockheed Martin Energy Research for the U.S. Depart-ment of Energy under contract DE-ACOS-960R22464.