Combinatorial laser processing of dielectric/ferroelectric thin and thick films

R. N. Das; C. Lew; I. Zergioti; M. O. Thompson; E. P. Giannelis

Combinatorial laser processing of dielectric/ferroelectric thin and thick films

R. N. Das, C. Lew, I. Zergioti, M. O. Thompson, E. P. Giannelis

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

A library of different crystalline sol-gel thin films with a composition of Ba_xTi_yO_z (where x = 1,2; y = 1,2,9 and z = 3, 7, 20) has been generated using variable multi-step laser and thermal annealing. Point by point X-ray diffraction characterization revealed the presence of high dielectric (BaTiO₃) and low dielectric (Ba₂Ti₂O₇ and Ba₂Ti₉O₂₀) phases. Appropriate laser and thermal annealing controlled crystallinity, phase content, morphology and dielectric property of libraries. We have extended the process to BaTiO₃ based thick-films and investigated the surface morphology of laser-annealed films.

Original language	English
Pages (from-to)	153-157
Number of pages	5
Journal	Materials Research Society Symposium - Proceedings
Volume	748
State	Published - 2003
Externally published	Yes
Event	Ferroelectric Thin Films XI - Boston, MA, United States Duration: Dec 2 2002 → Dec 5 2002

Cite this

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title = "Combinatorial laser processing of dielectric/ferroelectric thin and thick films",

abstract = "A library of different crystalline sol-gel thin films with a composition of BaxTiyOz (where x = 1,2; y = 1,2,9 and z = 3, 7, 20) has been generated using variable multi-step laser and thermal annealing. Point by point X-ray diffraction characterization revealed the presence of high dielectric (BaTiO3) and low dielectric (Ba2Ti2O7 and Ba2Ti9O20) phases. Appropriate laser and thermal annealing controlled crystallinity, phase content, morphology and dielectric property of libraries. We have extended the process to BaTiO3 based thick-films and investigated the surface morphology of laser-annealed films.",

author = "Das, \{R. N.\} and C. Lew and I. Zergioti and Thompson, \{M. O.\} and Giannelis, \{E. P.\}",

year = "2003",

language = "English",

volume = "748",

pages = "153--157",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

note = "Ferroelectric Thin Films XI ; Conference date: 02-12-2002 Through 05-12-2002",

}

TY - JOUR

T1 - Combinatorial laser processing of dielectric/ferroelectric thin and thick films

AU - Das, R. N.

AU - Lew, C.

AU - Zergioti, I.

AU - Thompson, M. O.

AU - Giannelis, E. P.

PY - 2003

Y1 - 2003

N2 - A library of different crystalline sol-gel thin films with a composition of BaxTiyOz (where x = 1,2; y = 1,2,9 and z = 3, 7, 20) has been generated using variable multi-step laser and thermal annealing. Point by point X-ray diffraction characterization revealed the presence of high dielectric (BaTiO3) and low dielectric (Ba2Ti2O7 and Ba2Ti9O20) phases. Appropriate laser and thermal annealing controlled crystallinity, phase content, morphology and dielectric property of libraries. We have extended the process to BaTiO3 based thick-films and investigated the surface morphology of laser-annealed films.

AB - A library of different crystalline sol-gel thin films with a composition of BaxTiyOz (where x = 1,2; y = 1,2,9 and z = 3, 7, 20) has been generated using variable multi-step laser and thermal annealing. Point by point X-ray diffraction characterization revealed the presence of high dielectric (BaTiO3) and low dielectric (Ba2Ti2O7 and Ba2Ti9O20) phases. Appropriate laser and thermal annealing controlled crystallinity, phase content, morphology and dielectric property of libraries. We have extended the process to BaTiO3 based thick-films and investigated the surface morphology of laser-annealed films.

UR - https://www.scopus.com/pages/publications/0038713717

M3 - Conference article

AN - SCOPUS:0038713717

SN - 0272-9172

VL - 748

SP - 153

EP - 157

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Ferroelectric Thin Films XI

Y2 - 2 December 2002 through 5 December 2002

ER -

Combinatorial laser processing of dielectric/ferroelectric thin and thick films

Abstract

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