Coherent x-ray diffraction imaging of silicon oxide growth

I. K. Robinson; J. L. Libbert; I. A. Vartanyants; J. A. Pitney; D. M. Smilgies; D. L. Abernathy; G. Grübel

doi:10.1103/PhysRevB.60.9965

Coherent x-ray diffraction imaging of silicon oxide growth

I. K. Robinson, J. L. Libbert, I. A. Vartanyants, J. A. Pitney, D. M. Smilgies, D. L. Abernathy, G. Grübel

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36 Scopus citations

Abstract

We have measured the morphology of Si samples as a function of time in air after stripping of the native oxide. For this purpose we examined the reflectivity of a coherent beam of x rays, which produces a structured diffraction pattern. We have made further progress in the development of an inversion algorithm for conversion of these patterns into one-dimensional height images. Nanometer-sized features are found to grow and evolve in waves across the surface on the time scale of minutes to hours.

Original language	English
Pages (from-to)	9965-9972
Number of pages	8
Journal	Physical Review B - Condensed Matter and Materials Physics
Volume	60
Issue number	14
DOIs	https://doi.org/10.1103/PhysRevB.60.9965
State	Published - 1999
Externally published	Yes

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title = "Coherent x-ray diffraction imaging of silicon oxide growth",

abstract = "We have measured the morphology of Si samples as a function of time in air after stripping of the native oxide. For this purpose we examined the reflectivity of a coherent beam of x rays, which produces a structured diffraction pattern. We have made further progress in the development of an inversion algorithm for conversion of these patterns into one-dimensional height images. Nanometer-sized features are found to grow and evolve in waves across the surface on the time scale of minutes to hours.",

author = "Robinson, {I. K.} and Libbert, {J. L.} and Vartanyants, {I. A.} and Pitney, {J. A.} and Smilgies, {D. M.} and Abernathy, {D. L.} and G. Gr{\"u}bel",

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AU - Robinson, I. K.

AU - Libbert, J. L.

AU - Vartanyants, I. A.

AU - Pitney, J. A.

AU - Smilgies, D. M.

AU - Abernathy, D. L.

AU - Grübel, G.

PY - 1999

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AB - We have measured the morphology of Si samples as a function of time in air after stripping of the native oxide. For this purpose we examined the reflectivity of a coherent beam of x rays, which produces a structured diffraction pattern. We have made further progress in the development of an inversion algorithm for conversion of these patterns into one-dimensional height images. Nanometer-sized features are found to grow and evolve in waves across the surface on the time scale of minutes to hours.

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DO - 10.1103/PhysRevB.60.9965

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Coherent x-ray diffraction imaging of silicon oxide growth

Abstract

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