Abstract
A common problem in analytical scanning electron microscopy (SEM) using electron backscatter diffraction (EBSD) is the differentiation of phases with distinct chemistry but the same or very similar crystal structure. X-ray energy dispersive spectroscopy (EDS) is useful to help differentiate these phases of similar crystal structures but different elemental makeups. However, open, automated, and unbiased methods of differentiating phases of similar EBSD responses based on their EDS response are lacking. This paper describes a simple data analytics-based method, using a combination of singular value decomposition and cluster analysis, to merge simultaneously acquired EDS + EBSD information and automatically determine phases from both their crystal and elemental data. I use hexagonal TiB2 ceramic contaminated with multiple crystallographically ambiguous but chemically distinct cubic phases to illustrate the method. Code, in the form of a Python 3 Jupyter Notebook, and the necessary data to replicate the analysis are provided as Supplementary material.
Original language | English |
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Pages (from-to) | 371-382 |
Number of pages | 12 |
Journal | Microscopy and Microanalysis |
Volume | 28 |
Issue number | 2 |
DOIs | |
State | Published - Apr 18 2022 |
Funding
The author thanks to Dr. Hanns Gietl and Dr. John Echols, ORNL, for critiquing the manuscript. This manuscript has been authored by UT-Battelle, LLC under Contract No. DE-AC05-00OR22725 with the U.S. Department of Energy. The United States Government retains and the publisher, by accepting the article for publication, acknowledges that the United States Government retains a non-exclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this manuscript, or allow others to do so, for United States Government purposes. The Department of Energy will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan ( http://energy.gov/downloads/doe-public-access-plan ). Sample courtesy G. Hilmas & W. Fahrenholtz, Missouri University of Science and Technology. This work was supported by US Department of Energy, Office of Science, Fusion Energy Sciences, under contract number DE-AC05-00OR22725.
Funders | Funder number |
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U.S. Department of Energy | |
Office of Science | |
Fusion Energy Sciences | DE-AC05-00OR22725 |
Keywords
- EBSD
- EDS
- data analysis
- data analytics
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Combined EDS and EBSD dataset from TiB2 ceramic material
Parish, C. (Creator), Constellation by Oak Ridge Leadership Computing Facility (OLCF), Sep 21 2021
DOI: 10.13139/ORNLNCCS/1819695
Dataset