Abstract
Color centers in diamond play a central role in the development of quantum photonic technologies, and their importance is only expected to grow in the near future. For many quantum applications, high collection efficiency from individual emitters is required, but the refractive index mismatch between diamond and air limits the optimal collection efficiency with conventional diamond device geometries. While different out-coupling methods with near-unity efficiency exist, many have yet to be realized due to current limitations in nanofabrication methods, especially for mechanically hard materials like diamond. Here, we leverage electron-beam-induced etching to modify Sn-implanted diamond quantum microchiplets containing integrated waveguides with a width and thickness of 280 nm and 200 nm, respectively. This approach allows for simultaneous high-resolution imaging and modification of the host matrix with an open geometry and direct writing. When coupled with the cathodoluminescence signal generated from the electron-emitter interactions, we can monitor the enhancement of the quantum emitters in real-time with nanoscale spatial resolution. The operando cathodoluminescence measurement and fabrication around single photon emitters demonstrated here provide a new foundation for the potential control of emitter-cavity interactions in integrated quantum photonics.
| Original language | English |
|---|---|
| Pages (from-to) | 2251-2258 |
| Number of pages | 8 |
| Journal | Nanophotonics |
| Volume | 13 |
| Issue number | 12 |
| DOIs | |
| State | Published - May 2 2024 |
Funding
Research funding: The work was supported by the U.S. Department of Energy, Office of Science, Materials Sciences and Engineering Division. The scanning electron microscopy research was performed and partially supported at Oak Ridge National Laboratory’s Center for Nanophase Materials Sciences (CNMS), a U.S. Department of Energy, Office of Science User Facility. This work was partially supported by AFOSR Grant FA9550-20-1-0105 supervised by Gernot Pomrenke, the NSF Center for Quantum Networks (CQN, 1941583), and Cisco Research. J.A. acknowledges the fund from the Army Research Office MURI (Ab-Initio Solid-State Quantum Materials) Grant No. W911NF-18-1-043. H.C. acknowledges the Claude E. Shannon Fellowship and the Samsung Scholarship. The scanning electron microscopy research was performed at Oak Ridge National Laboratory’s Center for Nanophase Materials Sciences (CNMS), a U.S. Department of Energy, Office of Science User Facility. The diamond QMCs fabrication was carried out, in part, through the use of MIT.nano’s facilities. J.A. acknowledges the support from KACST-MIT Ibn Khaldun Fellowship for Saudi Arabian Women at MIT and from Ibn Rushd Postdoctoral Award from King Abdullah University of Science and Technology (KAUST). D.E. acknowledges HSBC, Mekena Metcalf, Zapata Computing, and Yudong Cao for MIT QSEC collaboration. H.C. and D.E. also acknowledge Honda Research Institute and Avetik Harutyunyan.
Keywords
- SnV
- cathodoluminescence
- color centers in diamond
- diamond chiplets
- electron-beam-induced etching (EBIE)