Abstract
The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 Å can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.
| Original language | English |
|---|---|
| Pages (from-to) | 441-453 |
| Number of pages | 13 |
| Journal | Microscopy and Microanalysis |
| Volume | 15 |
| Issue number | 5 |
| DOIs | |
| State | Published - 2009 |
Keywords
- 3D
- STEM
- aberration
- resolution
- spherical