Characterizing the Two- and Three-Dimensional Resolution of an Improved Aberration-Corrected STEM

A. R. Lupini; A. Y. Borisevich; J. C. Idrobo; H. M. Christen; M. Biegalski; S. J. Pennycook

doi:10.1017/S1431927609990389

Characterizing the Two- and Three-Dimensional Resolution of an Improved Aberration-Corrected STEM

A. R. Lupini, A. Y. Borisevich, J. C. Idrobo, H. M. Christen, M. Biegalski, S. J. Pennycook

electron Microscopy and Microanalysis

Research output: Contribution to journal › Article › peer-review

33 Scopus citations

Abstract

The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 Å can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.

Original language	English
Pages (from-to)	441-453
Number of pages	13
Journal	Microscopy and Microanalysis
Volume	15
Issue number	5
DOIs	https://doi.org/10.1017/S1431927609990389
State	Published - 2009

Keywords

3D
STEM
aberration
resolution
spherical

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10.1017/S1431927609990389

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abstract = "The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 {\AA} can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.",

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AU - Borisevich, A. Y.

AU - Idrobo, J. C.

AU - Christen, H. M.

AU - Biegalski, M.

AU - Pennycook, S. J.

PY - 2009

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AB - The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 Å can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.

KW - 3D

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KW - aberration

KW - resolution

KW - spherical

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ER -

Characterizing the Two- and Three-Dimensional Resolution of an Improved Aberration-Corrected STEM

Abstract

Keywords

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