Characterization of zirconium nitride coatings deposited by cathodic arc sputtering

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    Abstract

    Polycrystalline ZrN coatings with a composition of 58.41 at.% Zr and 41.59 at.% N were deposited by cathodic arc evaporation on to Incoloy 825, Hastelloy C22 and Titanium Grade 12 metal substrates. Analyses of the coatings by scanning electron microscopy and Auger electron spectroscopy revealed the presence of 1-8-μm-diameter macroparticles composed of Zr metal. Compressive stresses of 4.06, 3.88 and 2.69 GPa were measured via X-ray diffraction in the coatings deposited on Inc., Hast. and Ti. substrates, respectively. Values for Young's modulus and hardness of 458 and 27.65 GPa, respectively, were obtained via nanoindentation. Studies of the interfacial chemistry via Auger electron spectroscopy and transmission electron microscopy revealed chemically abrupt interfaces and good compositional uniformity throughout the thickness of the zirconium nitride coatings.

    Original languageEnglish
    Pages (from-to)115-124
    Number of pages10
    JournalSurface and Coatings Technology
    Volume107
    Issue number2-3
    DOIs
    StatePublished - Sep 10 1998

    Funding

    The authors would like to express their sincere appreciation to L. Glover and W. Allen at Oak Ridge National Laboratory for providing assistance with the XPS and AES measurements and analyses. The research conducted by the first author was performed under the appointment to the Civilian Radioactive Waste Management Fellowship program administered by Oak Ridge Institute for Science and Education for the US Department of Energy. The coating residual stress analyses were sponsored by the Assistant Secretary for Energy Efficiency and Renewable Energy, Office of Transportation Technologies, as part of the High Temperature Materials Laboratory User Program at Oak Ridge National Laboratory which is managed by Lockheed Martin Energy Corporation for the US Department of Energy under contract number DE-AC05-96OR22464. R. Davis received partial support for this work from the Kobe Steel, Ltd professorship.

    Keywords

    • Cathodic arc sputtering
    • Hastelloy
    • Incoloy
    • Microstructure
    • Residual stress
    • Zirconium nitride coatings

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