TY - JOUR
T1 - Characterization of the piezoelectric properties of Pb0.98 Ba0.02(Mg1/3Nb2/3)O3- PbTiO3 epitaxial thin films
AU - Maria, Jon Paul
AU - Shepard, Joseph F.
AU - Trolier-McKinstry, Susan
AU - Watkins, T. R.
AU - Payzant, A. E.
PY - 2005
Y1 - 2005
N2 - Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) (70/30) thin films were deposited by pulsed laser deposition using two growth strategies: adsorption controlled deposition from lead-rich targets (∼ 25-30 mass%) and lower-temperature deposition (Td≤ 600°C) from targets containing a small amount of excess lead oxide (≤ 3 mass %). The substrates used were (001) SrRuO3/LaAlO3. Typical remanent polarization values ranged between 12 and 14 μC/cm2 for these films. The longitudinal piezoelectric coefficient (d33,f) was measured using in situ four-circle X-ray diffraction, and the transverse coefficient (d31,f or e31,f) was measured using the wafer flexure method. d33,f and e31,f coefficients of ∼ 300-350 pm/V and ∼ -11 C/m2 were calculated, respectively. In general, the piezoelectric coefficients and aging rates were strongly asymmetric, suggesting the presence of a polarization bias. The large, extremely stable piezoelectric response that results from poling parallel to the preferred polarization direction is attractive for miniaturized sensors and actuators.
AB - Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) (70/30) thin films were deposited by pulsed laser deposition using two growth strategies: adsorption controlled deposition from lead-rich targets (∼ 25-30 mass%) and lower-temperature deposition (Td≤ 600°C) from targets containing a small amount of excess lead oxide (≤ 3 mass %). The substrates used were (001) SrRuO3/LaAlO3. Typical remanent polarization values ranged between 12 and 14 μC/cm2 for these films. The longitudinal piezoelectric coefficient (d33,f) was measured using in situ four-circle X-ray diffraction, and the transverse coefficient (d31,f or e31,f) was measured using the wafer flexure method. d33,f and e31,f coefficients of ∼ 300-350 pm/V and ∼ -11 C/m2 were calculated, respectively. In general, the piezoelectric coefficients and aging rates were strongly asymmetric, suggesting the presence of a polarization bias. The large, extremely stable piezoelectric response that results from poling parallel to the preferred polarization direction is attractive for miniaturized sensors and actuators.
UR - http://www.scopus.com/inward/record.url?scp=15044349029&partnerID=8YFLogxK
U2 - 10.1111/j.1744-7402.2005.02004.x
DO - 10.1111/j.1744-7402.2005.02004.x
M3 - Article
AN - SCOPUS:15044349029
SN - 1546-542X
VL - 2
SP - 51
EP - 58
JO - International Journal of Applied Ceramic Technology
JF - International Journal of Applied Ceramic Technology
IS - 1
ER -