Characterization of atomic force microscope tips by adhesion force measurements

T. Thundat; X. Y. Zheng; G. Y. Chen; S. L. Sharp; R. J. Warmack; L. J. Schowalter

doi:10.1063/1.110569

Characterization of atomic force microscope tips by adhesion force measurements

T. Thundat, X. Y. Zheng, G. Y. Chen, S. L. Sharp, R. J. Warmack, L. J. Schowalter

Sensors and Electronics

Research output: Contribution to journal › Article › peer-review

73 Scopus citations

Abstract

The resolution limit in an atomic force microscope image usually is attributed to the finite radius of the contacting probe. Here, it is shown that this assumption is valid only when adhesion forces are minimal. Relative to the tip-imposed geometrical limit, the resolution and contrast in AFM images can be degraded by increasing adhesion forces. The large adhesion forces observed for some tips at low humidity conditions are shown to be due to tip contamination or poorly formed tip apexes. Methods to determine and to reduce the extent of tip contamination are described. Cleaning carried out using UV-ozone or oxygen-plasma etching were found to significantly reduce the minimum adhesion force.

Original language	English
Pages (from-to)	2150-2152
Number of pages	3
Journal	Applied Physics Letters
Volume	63
Issue number	15
DOIs	https://doi.org/10.1063/1.110569
State	Published - 1993

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10.1063/1.110569

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title = "Characterization of atomic force microscope tips by adhesion force measurements",

abstract = "The resolution limit in an atomic force microscope image usually is attributed to the finite radius of the contacting probe. Here, it is shown that this assumption is valid only when adhesion forces are minimal. Relative to the tip-imposed geometrical limit, the resolution and contrast in AFM images can be degraded by increasing adhesion forces. The large adhesion forces observed for some tips at low humidity conditions are shown to be due to tip contamination or poorly formed tip apexes. Methods to determine and to reduce the extent of tip contamination are described. Cleaning carried out using UV-ozone or oxygen-plasma etching were found to significantly reduce the minimum adhesion force.",

author = "T. Thundat and Zheng, \{X. Y.\} and Chen, \{G. Y.\} and Sharp, \{S. L.\} and Warmack, \{R. J.\} and Schowalter, \{L. J.\}",

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AU - Thundat, T.

AU - Zheng, X. Y.

AU - Chen, G. Y.

AU - Sharp, S. L.

AU - Warmack, R. J.

AU - Schowalter, L. J.

PY - 1993

Y1 - 1993

N2 - The resolution limit in an atomic force microscope image usually is attributed to the finite radius of the contacting probe. Here, it is shown that this assumption is valid only when adhesion forces are minimal. Relative to the tip-imposed geometrical limit, the resolution and contrast in AFM images can be degraded by increasing adhesion forces. The large adhesion forces observed for some tips at low humidity conditions are shown to be due to tip contamination or poorly formed tip apexes. Methods to determine and to reduce the extent of tip contamination are described. Cleaning carried out using UV-ozone or oxygen-plasma etching were found to significantly reduce the minimum adhesion force.

AB - The resolution limit in an atomic force microscope image usually is attributed to the finite radius of the contacting probe. Here, it is shown that this assumption is valid only when adhesion forces are minimal. Relative to the tip-imposed geometrical limit, the resolution and contrast in AFM images can be degraded by increasing adhesion forces. The large adhesion forces observed for some tips at low humidity conditions are shown to be due to tip contamination or poorly formed tip apexes. Methods to determine and to reduce the extent of tip contamination are described. Cleaning carried out using UV-ozone or oxygen-plasma etching were found to significantly reduce the minimum adhesion force.

UR - https://www.scopus.com/pages/publications/0000968524

U2 - 10.1063/1.110569

DO - 10.1063/1.110569

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VL - 63

SP - 2150

EP - 2152

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 15

ER -

Characterization of atomic force microscope tips by adhesion force measurements

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