Carbonized polymer nanostructures for biosensing

Mohammad Aminul Haque; Nicole McFarlane; Nickolay V. Lavrik; Dale Hensley

doi:10.1109/ASMC.2019.8791748

Carbonized polymer nanostructures for biosensing

Mohammad Aminul Haque, Nicole McFarlane, Nickolay V. Lavrik, Dale Hensley

Nanofabrication Research Laboratory

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

We have implemented carbonized nanostructures on metalized silica substrates as a step towards their integration on CMOS chips. The substrates were metallized successively with Ti and Au to provide electrical contact to the carbonized structures. Polymeric structures have been formed using 3D printing based on 2-photon polymerization. Carbonization of the polymeric structures has been achieved through a sequence of two thermal annealing steps in oxidative and inert atmospheres, respectively. Carbonization has been verified by Raman spectroscopy. Scanning electron microscopy images confirm the formation of structures and their morphology on the substrate. Integration of the demonstrated carbon structures with CMOS circuitries offer great promise for electrochemical biosensors.

Original language	English
Title of host publication	2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538676011
DOIs	https://doi.org/10.1109/ASMC.2019.8791748
State	Published - May 2019
Event	30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019 - Saratoga Springs, United States Duration: May 6 2019 → May 9 2019

Publication series

Name	ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings
Volume	2019-May
ISSN (Print)	1078-8743

Conference

Conference	30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019
Country/Territory	United States
City	Saratoga Springs
Period	05/6/19 → 05/9/19

Funding

A portion of this research was conducted at the Center for Nanophase Materials Sciences, which is a DOE Office of Science User Facility.

Funders	Funder number
Office of Science

Keywords

Biosensing
CMOS
Carbonization
Nanostructures
Polymer

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10.1109/ASMC.2019.8791748

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Haque, M. A., McFarlane, N., Lavrik, N. V., & Hensley, D. (2019). Carbonized polymer nanostructures for biosensing. In 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019 Article 8791748 (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings; Vol. 2019-May). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ASMC.2019.8791748

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title = "Carbonized polymer nanostructures for biosensing",

abstract = "We have implemented carbonized nanostructures on metalized silica substrates as a step towards their integration on CMOS chips. The substrates were metallized successively with Ti and Au to provide electrical contact to the carbonized structures. Polymeric structures have been formed using 3D printing based on 2-photon polymerization. Carbonization of the polymeric structures has been achieved through a sequence of two thermal annealing steps in oxidative and inert atmospheres, respectively. Carbonization has been verified by Raman spectroscopy. Scanning electron microscopy images confirm the formation of structures and their morphology on the substrate. Integration of the demonstrated carbon structures with CMOS circuitries offer great promise for electrochemical biosensors.",

keywords = "Biosensing, CMOS, Carbonization, Nanostructures, Polymer",

author = "Haque, {Mohammad Aminul} and Nicole McFarlane and Lavrik, {Nickolay V.} and Dale Hensley",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019 ; Conference date: 06-05-2019 Through 09-05-2019",

year = "2019",

month = may,

doi = "10.1109/ASMC.2019.8791748",

language = "English",

series = "ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings",

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Haque, MA, McFarlane, N, Lavrik, NV & Hensley, D 2019, Carbonized polymer nanostructures for biosensing. in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019., 8791748, ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, vol. 2019-May, Institute of Electrical and Electronics Engineers Inc., 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019, Saratoga Springs, United States, 05/6/19. https://doi.org/10.1109/ASMC.2019.8791748

Carbonized polymer nanostructures for biosensing. / Haque, Mohammad Aminul; McFarlane, Nicole; Lavrik, Nickolay V. et al.
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019. Institute of Electrical and Electronics Engineers Inc., 2019. 8791748 (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings; Vol. 2019-May).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Haque, Mohammad Aminul

AU - McFarlane, Nicole

AU - Lavrik, Nickolay V.

AU - Hensley, Dale

PY - 2019/5

Y1 - 2019/5

N2 - We have implemented carbonized nanostructures on metalized silica substrates as a step towards their integration on CMOS chips. The substrates were metallized successively with Ti and Au to provide electrical contact to the carbonized structures. Polymeric structures have been formed using 3D printing based on 2-photon polymerization. Carbonization of the polymeric structures has been achieved through a sequence of two thermal annealing steps in oxidative and inert atmospheres, respectively. Carbonization has been verified by Raman spectroscopy. Scanning electron microscopy images confirm the formation of structures and their morphology on the substrate. Integration of the demonstrated carbon structures with CMOS circuitries offer great promise for electrochemical biosensors.

AB - We have implemented carbonized nanostructures on metalized silica substrates as a step towards their integration on CMOS chips. The substrates were metallized successively with Ti and Au to provide electrical contact to the carbonized structures. Polymeric structures have been formed using 3D printing based on 2-photon polymerization. Carbonization of the polymeric structures has been achieved through a sequence of two thermal annealing steps in oxidative and inert atmospheres, respectively. Carbonization has been verified by Raman spectroscopy. Scanning electron microscopy images confirm the formation of structures and their morphology on the substrate. Integration of the demonstrated carbon structures with CMOS circuitries offer great promise for electrochemical biosensors.

KW - Biosensing

KW - CMOS

KW - Carbonization

KW - Nanostructures

KW - Polymer

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U2 - 10.1109/ASMC.2019.8791748

DO - 10.1109/ASMC.2019.8791748

M3 - Conference contribution

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T3 - ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

BT - 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019

Y2 - 6 May 2019 through 9 May 2019

ER -

Carbonized polymer nanostructures for biosensing

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