TY - GEN
T1 - Carbonized Polymer for Joule Heating Processing Towards Biosensor Development
AU - Haque, Mohammad Aminul
AU - Lavrik, Nickolay V.
AU - Hensley, Dale
AU - Briggs, Dayrl P.
AU - McFarlane, Nicole
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021
Y1 - 2021
N2 - This paper presents the experimental findings towards developing carbonized microelectrodes using a Joule heating process within a temperature window that is compatible with CMOS. Bridge-on-pillars polymer structures have been 3D-printed using two-photon polymerization (2PP). They have been annealed in various processing conditions to increase the fraction of carbon in the precursor material and to achieve appreciable electric conductivity so that they can be used to drive current to enable Joule heating. To evaluate the outcome of the processing sequences, Raman spectroscopy has been performed to assess the degree of carbonization. Such CMOS-compatible carbon electrodes are important for monolithic, low-cost biosensor development.Clinical relevance - This establishes the potential of carbonized polymer electrode for low-cost, CMOS-compatible monolithic biosensor platform for implementation in medical diagnosis and treatment.
AB - This paper presents the experimental findings towards developing carbonized microelectrodes using a Joule heating process within a temperature window that is compatible with CMOS. Bridge-on-pillars polymer structures have been 3D-printed using two-photon polymerization (2PP). They have been annealed in various processing conditions to increase the fraction of carbon in the precursor material and to achieve appreciable electric conductivity so that they can be used to drive current to enable Joule heating. To evaluate the outcome of the processing sequences, Raman spectroscopy has been performed to assess the degree of carbonization. Such CMOS-compatible carbon electrodes are important for monolithic, low-cost biosensor development.Clinical relevance - This establishes the potential of carbonized polymer electrode for low-cost, CMOS-compatible monolithic biosensor platform for implementation in medical diagnosis and treatment.
UR - http://www.scopus.com/inward/record.url?scp=85122506064&partnerID=8YFLogxK
U2 - 10.1109/EMBC46164.2021.9630908
DO - 10.1109/EMBC46164.2021.9630908
M3 - Conference contribution
C2 - 34892844
AN - SCOPUS:85122506064
T3 - Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS
SP - 7578
EP - 7581
BT - 43rd Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 43rd Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2021
Y2 - 1 November 2021 through 5 November 2021
ER -