Abstract
The potential of cantilever transducers as a platform for chemical and biological sensors was discussed. The operation principles and models for the cantilever transducers were also presented. Cantilever sensors offer improved dynamic response, high precision, increased reliability and greatly reduced size as compared to conventional sensors. Other advantages of microcantilever sensors are that they can operate in vacuum, gases and liquids and deformations and resonance frequency shifts measured simultaneously provide complementary information about the interactions between the transducers and the environment.
| Original language | English |
|---|---|
| Pages (from-to) | 2229-2253 |
| Number of pages | 25 |
| Journal | Review of Scientific Instruments |
| Volume | 75 |
| Issue number | 7 |
| DOIs | |
| State | Published - Jul 2004 |