Abstract
The Bragg-diffraction-type acousto-optic (AO) device using Pb(ZrTi)O3 film was discussed. In the fabrication of a Bragg diffraction type AO device, it was important to select an optimum piezoeletric material and an optical waveguide with large piezoelectric constant AO figure of merit (M2). Analysis of ζ with varied film thickness allowed to obtain the total propagation ratio of acoustic power from the PZT to SiNx film and M2, SiNx (0.75 ×10-18 s3/g).
Original language | English |
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Pages (from-to) | 3153-3155 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 82 |
Issue number | 19 |
DOIs | |
State | Published - May 12 2003 |
Externally published | Yes |