Bi-material terahertz sensors using metamaterial structures

Fabio Alves; Dragoslav Grbovic; Brian Kearney; Nickolay V. Lavrik; Gamani Karunasiri

doi:10.1364/OE.21.013256

Bi-material terahertz sensors using metamaterial structures

Fabio Alves, Dragoslav Grbovic, Brian Kearney, Nickolay V. Lavrik, Gamani Karunasiri

Nanofabrication Research Laboratory

Research output: Contribution to journal › Article › peer-review

110 Scopus citations

Abstract

In this paper we report on the design, fabrication and characterization of terahertz (THz) bi-material sensors with metamaterial absorbers. MEMS fabrication-friendly SiOx and Al are used to maximize the bimetallic effect and metamaterial absorption at 3.8 THz, the frequency of a quantum cascade laser illumination source. Sensors with different configurations were fabricated and the measured absorption is near 100% and responsivity is around 1.2 deg/μW, which agree well with finite element simulations. The results indicate the potential of using these detectors to fabricate focal plane arrays for real time THz imaging.

Original language	English
Pages (from-to)	13256-13271
Number of pages	16
Journal	Optics Express
Volume	21
Issue number	11
DOIs	https://doi.org/10.1364/OE.21.013256
State	Published - Jun 3 2013

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abstract = "In this paper we report on the design, fabrication and characterization of terahertz (THz) bi-material sensors with metamaterial absorbers. MEMS fabrication-friendly SiOx and Al are used to maximize the bimetallic effect and metamaterial absorption at 3.8 THz, the frequency of a quantum cascade laser illumination source. Sensors with different configurations were fabricated and the measured absorption is near 100% and responsivity is around 1.2 deg/μW, which agree well with finite element simulations. The results indicate the potential of using these detectors to fabricate focal plane arrays for real time THz imaging.",

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AU - Grbovic, Dragoslav

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AU - Karunasiri, Gamani

PY - 2013/6/3

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AB - In this paper we report on the design, fabrication and characterization of terahertz (THz) bi-material sensors with metamaterial absorbers. MEMS fabrication-friendly SiOx and Al are used to maximize the bimetallic effect and metamaterial absorption at 3.8 THz, the frequency of a quantum cascade laser illumination source. Sensors with different configurations were fabricated and the measured absorption is near 100% and responsivity is around 1.2 deg/μW, which agree well with finite element simulations. The results indicate the potential of using these detectors to fabricate focal plane arrays for real time THz imaging.

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Bi-material terahertz sensors using metamaterial structures

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