Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing

C. L. Britton; R. J. Warmack; S. F. Smith; P. I. Oden; R. L. Jones; T. Thundat; G. M. Brown; W. L. Bryan; J. C. Depriest; M. N. Ericson; M. S. Emery; M. R. Moore; G. W. Turner; A. L. Wintenberg; T. D. Threatt; Z. Hu; L. G. Clonts; J. M. Rochelle

doi:10.1109/ARVLSI.1999.756060

Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing

C. L. Britton, R. J. Warmack, S. F. Smith, P. I. Oden, R. L. Jones, T. Thundat, G. M. Brown, W. L. Bryan, J. C. Depriest, M. N. Ericson, M. S. Emery, M. R. Moore, G. W. Turner, A. L. Wintenberg, T. D. Threatt, Z. Hu, L. G. Clonts, J. M. Rochelle

Sensors and Electronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

13 Scopus citations

Abstract

Researchers at Oak Ridge National Laboratory (ORNL) are developing selectively coated cantilever arrays in a surface-micromachined MEMS process for very high sensitivities in chemical and biological sensing. Toward this end, we have developed a one-dimensional (1-D) 10-element microcantilever array that we have coated with gold for mercury sensing and palladium for hydrogen sensing. Ultimately we will coat each element with a different coating. Currently, measurements have been performed using a companion analog 1.2-μm CMOS eight channel readout chip also designed at ORNL specifically for the microcantilever arrays. In addition, we have combined our sensors with an ORNL-developed RF-telemetry chip having on-chip spread spectrum encoding and modulation circuitry to improve the robustness and security of sensor data in typical interference- and multipath-impaired environments. We have also provided for a selection of distinct spreading codes to serve groups of sensors in a common environment by the application of code-division multiple-access techniques. Our initial system is configured for use in the 915-MHz Industrial, Scientific, and Medical (ISM) band. The entire package is powered by four AA batteries.

Original language	English
Title of host publication	Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999
Editors	Stephen P. DeWeerth, D. Scott Wills
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	359-368
Number of pages	10
ISBN (Electronic)	0769500560, 9780769500560
DOIs	https://doi.org/10.1109/ARVLSI.1999.756060
State	Published - 1999
Event	1999 Conference on Advanced Research in VLSI, ARVLSI 1999 - Atlanta, United States Duration: Mar 21 1999 → Mar 24 1999

Publication series

Name	Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999

Conference

Conference	1999 Conference on Advanced Research in VLSI, ARVLSI 1999
Country/Territory	United States
City	Atlanta
Period	03/21/99 → 03/24/99

Funding

The authors would like to thank Norma Hensley for her assistance in preparing this manuscript. This research sponsored by the U. S. Department of Energy and performed at Oak Ridge National Laboratory, managed by Lockheed Martin Energy Research, Inc. for the U. S. Department of Energy under Contract No. DE-AC05-96OR22464.

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Britton, C. L., Warmack, R. J., Smith, S. F., Oden, P. I., Jones, R. L., Thundat, T., Brown, G. M., Bryan, W. L., Depriest, J. C., Ericson, M. N., Emery, M. S., Moore, M. R., Turner, G. W., Wintenberg, A. L., Threatt, T. D., Hu, Z., Clonts, L. G., & Rochelle, J. M. (1999). Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing. In S. P. DeWeerth, & D. S. Wills (Eds.), Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999 (pp. 359-368). Article 756060 (Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ARVLSI.1999.756060

Britton, C. L. ; Warmack, R. J. ; Smith, S. F. et al. / Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing. Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999. editor / Stephen P. DeWeerth ; D. Scott Wills. Institute of Electrical and Electronics Engineers Inc., 1999. pp. 359-368 (Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999).

@inproceedings{08d4e9ce907445fdaa4e3489e21e4f85,

title = "Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing",

abstract = "Researchers at Oak Ridge National Laboratory (ORNL) are developing selectively coated cantilever arrays in a surface-micromachined MEMS process for very high sensitivities in chemical and biological sensing. Toward this end, we have developed a one-dimensional (1-D) 10-element microcantilever array that we have coated with gold for mercury sensing and palladium for hydrogen sensing. Ultimately we will coat each element with a different coating. Currently, measurements have been performed using a companion analog 1.2-μm CMOS eight channel readout chip also designed at ORNL specifically for the microcantilever arrays. In addition, we have combined our sensors with an ORNL-developed RF-telemetry chip having on-chip spread spectrum encoding and modulation circuitry to improve the robustness and security of sensor data in typical interference- and multipath-impaired environments. We have also provided for a selection of distinct spreading codes to serve groups of sensors in a common environment by the application of code-division multiple-access techniques. Our initial system is configured for use in the 915-MHz Industrial, Scientific, and Medical (ISM) band. The entire package is powered by four AA batteries.",

author = "Britton, {C. L.} and Warmack, {R. J.} and Smith, {S. F.} and Oden, {P. I.} and Jones, {R. L.} and T. Thundat and Brown, {G. M.} and Bryan, {W. L.} and Depriest, {J. C.} and Ericson, {M. N.} and Emery, {M. S.} and Moore, {M. R.} and Turner, {G. W.} and Wintenberg, {A. L.} and Threatt, {T. D.} and Z. Hu and Clonts, {L. G.} and Rochelle, {J. M.}",

note = "Publisher Copyright: {\textcopyright} 1999 IEEE.; 1999 Conference on Advanced Research in VLSI, ARVLSI 1999 ; Conference date: 21-03-1999 Through 24-03-1999",

year = "1999",

doi = "10.1109/ARVLSI.1999.756060",

language = "English",

series = "Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "359--368",

editor = "DeWeerth, {Stephen P.} and Wills, {D. Scott}",

booktitle = "Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999",

}

Britton, CL , Warmack, RJ, Smith, SF, Oden, PI, Jones, RL, Thundat, T, Brown, GM, Bryan, WL, Depriest, JC, Ericson, MN, Emery, MS, Moore, MR, Turner, GW, Wintenberg, AL, Threatt, TD, Hu, Z, Clonts, LG & Rochelle, JM 1999, Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing. in SP DeWeerth & DS Wills (eds), Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999., 756060, Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999, Institute of Electrical and Electronics Engineers Inc., pp. 359-368, 1999 Conference on Advanced Research in VLSI, ARVLSI 1999, Atlanta, United States, 03/21/99. https://doi.org/10.1109/ARVLSI.1999.756060

Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing. / Britton, C. L.; Warmack, R. J.; Smith, S. F. et al.
Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999. ed. / Stephen P. DeWeerth; D. Scott Wills. Institute of Electrical and Electronics Engineers Inc., 1999. p. 359-368 756060 (Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Turner, G. W.

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N2 - Researchers at Oak Ridge National Laboratory (ORNL) are developing selectively coated cantilever arrays in a surface-micromachined MEMS process for very high sensitivities in chemical and biological sensing. Toward this end, we have developed a one-dimensional (1-D) 10-element microcantilever array that we have coated with gold for mercury sensing and palladium for hydrogen sensing. Ultimately we will coat each element with a different coating. Currently, measurements have been performed using a companion analog 1.2-μm CMOS eight channel readout chip also designed at ORNL specifically for the microcantilever arrays. In addition, we have combined our sensors with an ORNL-developed RF-telemetry chip having on-chip spread spectrum encoding and modulation circuitry to improve the robustness and security of sensor data in typical interference- and multipath-impaired environments. We have also provided for a selection of distinct spreading codes to serve groups of sensors in a common environment by the application of code-division multiple-access techniques. Our initial system is configured for use in the 915-MHz Industrial, Scientific, and Medical (ISM) band. The entire package is powered by four AA batteries.

AB - Researchers at Oak Ridge National Laboratory (ORNL) are developing selectively coated cantilever arrays in a surface-micromachined MEMS process for very high sensitivities in chemical and biological sensing. Toward this end, we have developed a one-dimensional (1-D) 10-element microcantilever array that we have coated with gold for mercury sensing and palladium for hydrogen sensing. Ultimately we will coat each element with a different coating. Currently, measurements have been performed using a companion analog 1.2-μm CMOS eight channel readout chip also designed at ORNL specifically for the microcantilever arrays. In addition, we have combined our sensors with an ORNL-developed RF-telemetry chip having on-chip spread spectrum encoding and modulation circuitry to improve the robustness and security of sensor data in typical interference- and multipath-impaired environments. We have also provided for a selection of distinct spreading codes to serve groups of sensors in a common environment by the application of code-division multiple-access techniques. Our initial system is configured for use in the 915-MHz Industrial, Scientific, and Medical (ISM) band. The entire package is powered by four AA batteries.

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Britton CL , Warmack RJ, Smith SF, Oden PI, Jones RL, Thundat T et al. Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing. In DeWeerth SP, Wills DS, editors, Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999. Institute of Electrical and Electronics Engineers Inc. 1999. p. 359-368. 756060. (Proceedings - 20th Anniversary Conference on Advanced Research in VLSI, ARVLSI 1999). doi: 10.1109/ARVLSI.1999.756060

Battery-powered, wireless MEMS sensors for high-sensitivity chemical and biological sensing

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