BaTiO3 films by low-temperature hydrothermal techniques for next generation packaging applications

D. Balaraman; P. M. Raj; L. Wan; I. R. Abothu; S. Bhattacharya; S. Dalmia; M. J. Lance; M. Swaminathan; M. D. Sacks; R. R. Tummala

doi:10.1007/s10832-004-5082-2

BaTiO₃ films by low-temperature hydrothermal techniques for next generation packaging applications

D. Balaraman, P. M. Raj, L. Wan, I. R. Abothu, S. Bhattacharya, S. Dalmia, M. J. Lance, M. Swaminathan, M. D. Sacks, R. R. Tummala

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

This work reports synthesis, characterization and integration of sub-micron thick nano-grained barium titanate films on organic Printed Wiring Boards (PWB). Barium titanate films were synthesized on titanium foils at 95°C. SEM of films revealed 80 nm grains. The films were characterized using XRD, FTIR and Raman spectroscopy. As-synthesized films exhibited high capacitance densities and dielectric loss. The films were treated with oxygen plasma to reduce entrapped hydroxyl groups and this resulted in improved dielectric properties. The plasma treated films exhibited a capacitance density of 1 μ F/cm² and a dielectric loss of 0.06. The high frequency dielectric properties were extracted from s-parameter measurements on CPW structures on these films and were found to be stable up to 8 GHz.

Original language	English
Pages (from-to)	95-100
Number of pages	6
Journal	Journal of Electroceramics
Volume	13
Issue number	1-3
DOIs	https://doi.org/10.1007/s10832-004-5082-2
State	Published - Jul 2004

Funding

This work was supported by the National Science Foundation (NSF) through the NSF ERC in Electronic Packaging (EEC-9402723) at Georgia Institute of Technology. Raman spectroscopy work was supported by Division of Materials Sciences and Engineering, U.S. Department of Energy, under Contract DE-AC05-00OR22725 with UT-Battelle, LLC.

Keywords

Barium titanate
Decoupling
Dielectric constant
Embedded capacitors
FTIR
High frequency
PWB
Raman

Access to Document

10.1007/s10832-004-5082-2

Cite this

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title = "BaTiO3 films by low-temperature hydrothermal techniques for next generation packaging applications",

abstract = "This work reports synthesis, characterization and integration of sub-micron thick nano-grained barium titanate films on organic Printed Wiring Boards (PWB). Barium titanate films were synthesized on titanium foils at 95°C. SEM of films revealed 80 nm grains. The films were characterized using XRD, FTIR and Raman spectroscopy. As-synthesized films exhibited high capacitance densities and dielectric loss. The films were treated with oxygen plasma to reduce entrapped hydroxyl groups and this resulted in improved dielectric properties. The plasma treated films exhibited a capacitance density of 1 μ F/cm2 and a dielectric loss of 0.06. The high frequency dielectric properties were extracted from s-parameter measurements on CPW structures on these films and were found to be stable up to 8 GHz.",

keywords = "Barium titanate, Decoupling, Dielectric constant, Embedded capacitors, FTIR, High frequency, PWB, Raman",

author = "D. Balaraman and Raj, \{P. M.\} and L. Wan and Abothu, \{I. R.\} and S. Bhattacharya and S. Dalmia and Lance, \{M. J.\} and M. Swaminathan and Sacks, \{M. D.\} and Tummala, \{R. R.\}",

year = "2004",

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doi = "10.1007/s10832-004-5082-2",

language = "English",

volume = "13",

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T1 - BaTiO3 films by low-temperature hydrothermal techniques for next generation packaging applications

AU - Balaraman, D.

AU - Raj, P. M.

AU - Wan, L.

AU - Abothu, I. R.

AU - Bhattacharya, S.

AU - Dalmia, S.

AU - Lance, M. J.

AU - Swaminathan, M.

AU - Sacks, M. D.

AU - Tummala, R. R.

PY - 2004/7

Y1 - 2004/7

N2 - This work reports synthesis, characterization and integration of sub-micron thick nano-grained barium titanate films on organic Printed Wiring Boards (PWB). Barium titanate films were synthesized on titanium foils at 95°C. SEM of films revealed 80 nm grains. The films were characterized using XRD, FTIR and Raman spectroscopy. As-synthesized films exhibited high capacitance densities and dielectric loss. The films were treated with oxygen plasma to reduce entrapped hydroxyl groups and this resulted in improved dielectric properties. The plasma treated films exhibited a capacitance density of 1 μ F/cm2 and a dielectric loss of 0.06. The high frequency dielectric properties were extracted from s-parameter measurements on CPW structures on these films and were found to be stable up to 8 GHz.

AB - This work reports synthesis, characterization and integration of sub-micron thick nano-grained barium titanate films on organic Printed Wiring Boards (PWB). Barium titanate films were synthesized on titanium foils at 95°C. SEM of films revealed 80 nm grains. The films were characterized using XRD, FTIR and Raman spectroscopy. As-synthesized films exhibited high capacitance densities and dielectric loss. The films were treated with oxygen plasma to reduce entrapped hydroxyl groups and this resulted in improved dielectric properties. The plasma treated films exhibited a capacitance density of 1 μ F/cm2 and a dielectric loss of 0.06. The high frequency dielectric properties were extracted from s-parameter measurements on CPW structures on these films and were found to be stable up to 8 GHz.

KW - Barium titanate

KW - Decoupling

KW - Dielectric constant

KW - Embedded capacitors

KW - FTIR

KW - High frequency

KW - PWB

KW - Raman

UR - https://www.scopus.com/pages/publications/20144387492

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