Automatic classification of spatial signatures on semiconductor wafer maps

Kenneth W. Tobin, Shaun S. Gleason, Thomas P. Karnowski, Susan L. Cohen, Fred Lakhani

Research output: Contribution to journalConference articlepeer-review

19 Scopus citations

Fingerprint

Dive into the research topics of 'Automatic classification of spatial signatures on semiconductor wafer maps'. Together they form a unique fingerprint.

Computer Science