@inproceedings{4b8f0925f08741918f93518b1e981ecc,
title = "Automatic classification of spatial signatures on semiconductor wafermaps",
keywords = "Automatic inspection, Classifier training, Fuzzy classifier, Pattern recognition, Semiconductor, Spatial signature, Wafermap analysis",
author = "KW Tobin and SS Gleason and TP Karnowski and SL Cohen and F Lakhani",
year = "1997",
language = "American English",
pages = "434--444",
editor = "SK Jones",
booktitle = "Metrology, Inspection, And Process Control For Microlithography Xi",
}