Abstract
This review examines the development of atomically resolved electron energy loss spectroscopy from the first demonstration of plane-by-plane compositional profiling, through column-by-column spectroscopy to full two-dimensional and potentially three-dimensional spectroscopic imaging. Examples will be presented to highlight the increasing analytical sensitivity and image contrast obtained through each generation of aberration correction, moving towards the ultimate goal of mapping electronic structure inside materials with atomic resolution.
| Original language | English |
|---|---|
| Pages (from-to) | 87-97 |
| Number of pages | 11 |
| Journal | Journal of Electron Microscopy |
| Volume | 58 |
| Issue number | 3 |
| DOIs | |
| State | Published - Jun 2009 |
Funding
The authors would like to thank L. J. Allen for helpful discussions, and their collaborators in the work reviewed here, N. D. Browning, M. M. McGibbon, E. C. Dickey, V. P. Dravid, P. D. Nellist, D. J. Wallis, G. Duscher, S. D. Findlay, H. M. Christen, A. Y. Borisevich, N. Dellby, O. L. Krivanek, L. J. Allen, T. J. Pennycook, K. van Benthem, A. J. D’Alfonso, M. F. Murfitt, Z. S. Szilagyi, R. Jin, B. Sales, D. G. Mandrus, W. Luo, M. Watanabe, J. Tao, S. T. Pantelides, W. H. Sides and J. T. Luck, which was supported by the Division of Materials Sciences and Engineering, USDOE and in part by the Laboratory Directed Research and Development Program of ORNL.
| Funders | Funder number |
|---|---|
| U.S. Department of Energy | |
| Laboratory Directed Research and Development | |
| Division of Materials Sciences and Engineering |
Keywords
- Annular dark field
- Column-by-column spectroscopy
- Electron energy loss
- Scanning transmission electron microscopy
- Spectroscopy