Atomic-Resolution Electron Energy Loss Spectroscopy Imaging in Aberration Corrected Scanning Transmission Electron Microscopy

L. J. Allen; S. D. Findlay; A. R. Lupini; M. P. Oxley; S. J. Pennycook

doi:10.1103/PhysRevLett.91.105503

Atomic-Resolution Electron Energy Loss Spectroscopy Imaging in Aberration Corrected Scanning Transmission Electron Microscopy

L. J. Allen, S. D. Findlay, A. R. Lupini, M. P. Oxley, S. J. Pennycook

electron Microscopy and Microanalysis

Research output: Contribution to journal › Article › peer-review

95 Scopus citations

Abstract

The “delocalization” of inelastic scattering is an important issue for the ultimate spatial resolution of innershell spectroscopy in the electron microscope. It is demonstrated in a nonlocal model for electron energy loss spectroscopy (EELS) that delocalization of scanning transmission electron microscopy (STEM) images for single, isolated atoms is primarily determined by the width of the probe, even for light atoms. We present experimental data and theoretical simulations for Ti [Formula presented]-shell EELS in a [100] [Formula presented] crystal showing that, in this case, delocalization is not significantly increased by dynamical propagation. Issues relating to the use of aberration correctors in the STEM geometry are discussed.

Original language	English
Journal	Physical Review Letters
Volume	91
Issue number	10
DOIs	https://doi.org/10.1103/PhysRevLett.91.105503
State	Published - Sep 5 2003

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title = "Atomic-Resolution Electron Energy Loss Spectroscopy Imaging in Aberration Corrected Scanning Transmission Electron Microscopy",

abstract = "The “delocalization” of inelastic scattering is an important issue for the ultimate spatial resolution of innershell spectroscopy in the electron microscope. It is demonstrated in a nonlocal model for electron energy loss spectroscopy (EELS) that delocalization of scanning transmission electron microscopy (STEM) images for single, isolated atoms is primarily determined by the width of the probe, even for light atoms. We present experimental data and theoretical simulations for Ti [Formula presented]-shell EELS in a [100] [Formula presented] crystal showing that, in this case, delocalization is not significantly increased by dynamical propagation. Issues relating to the use of aberration correctors in the STEM geometry are discussed.",

author = "Allen, {L. J.} and Findlay, {S. D.} and Lupini, {A. R.} and Oxley, {M. P.} and Pennycook, {S. J.}",

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T1 - Atomic-Resolution Electron Energy Loss Spectroscopy Imaging in Aberration Corrected Scanning Transmission Electron Microscopy

AU - Allen, L. J.

AU - Findlay, S. D.

AU - Lupini, A. R.

AU - Oxley, M. P.

AU - Pennycook, S. J.

PY - 2003/9/5

Y1 - 2003/9/5

N2 - The “delocalization” of inelastic scattering is an important issue for the ultimate spatial resolution of innershell spectroscopy in the electron microscope. It is demonstrated in a nonlocal model for electron energy loss spectroscopy (EELS) that delocalization of scanning transmission electron microscopy (STEM) images for single, isolated atoms is primarily determined by the width of the probe, even for light atoms. We present experimental data and theoretical simulations for Ti [Formula presented]-shell EELS in a [100] [Formula presented] crystal showing that, in this case, delocalization is not significantly increased by dynamical propagation. Issues relating to the use of aberration correctors in the STEM geometry are discussed.

AB - The “delocalization” of inelastic scattering is an important issue for the ultimate spatial resolution of innershell spectroscopy in the electron microscope. It is demonstrated in a nonlocal model for electron energy loss spectroscopy (EELS) that delocalization of scanning transmission electron microscopy (STEM) images for single, isolated atoms is primarily determined by the width of the probe, even for light atoms. We present experimental data and theoretical simulations for Ti [Formula presented]-shell EELS in a [100] [Formula presented] crystal showing that, in this case, delocalization is not significantly increased by dynamical propagation. Issues relating to the use of aberration correctors in the STEM geometry are discussed.

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DO - 10.1103/PhysRevLett.91.105503

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VL - 91

JO - Physical Review Letters

JF - Physical Review Letters

IS - 10

ER -

Atomic-Resolution Electron Energy Loss Spectroscopy Imaging in Aberration Corrected Scanning Transmission Electron Microscopy

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