Atomic configuration of irradiation-induced planar defects in 3C-SiC

Y. R. Lin, C. Y. Ho, C. Y. Hsieh, M. T. Chang, S. C. Lo, F. R. Chen, J. J. Kai

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Abstract

The atomic configuration of irradiation-induced planar defects in single crystal 3C-SiC at high irradiation temperatures was shown in this research. A spherical aberration corrected scanning transmission electron microscope provided images of individual silicon and carbon atoms by the annular bright-field (ABF) method. Two types of irradiation-induced planar defects were observed in the ABF images including the extrinsic stacking fault loop with two offset Si-C bilayers and the intrinsic stacking fault loop with one offset Si-C bilayer. The results are in good agreement with images simulated under identical conditions.

Original languageEnglish
Article number121909
JournalApplied Physics Letters
Volume104
Issue number12
DOIs
StatePublished - Mar 24 2014
Externally publishedYes

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