Atom-by-atom fabrication with electron beams

Ondrej Dyck; Maxim Ziatdinov; David B. Lingerfelt; Raymond R. Unocic; Bethany M. Hudak; Andrew R. Lupini; Stephen Jesse; Sergei V. Kalinin

doi:10.1038/s41578-019-0118-z

Atom-by-atom fabrication with electron beams

Ondrej Dyck, Maxim Ziatdinov, David B. Lingerfelt, Raymond R. Unocic, Bethany M. Hudak, Andrew R. Lupini, Stephen Jesse, Sergei V. Kalinin

Research output: Contribution to journal › Article › peer-review

80 Scopus citations

Abstract

Assembling matter atom-by-atom into functional devices is the ultimate goal of nanotechnology. The possibility of achieving this goal is intrinsically dependent on the ability to visualize matter at the atomic level, induce and control atomic-scale motion, facilitate and direct chemical reactions, and coordinate and guide fabrication processes towards desired structures atom-by-atom. In this Perspective, we summarize recent progress in chemical transformations, material alterations and atomic dynamics studies enabled by the converged, atomic-sized electron beam of an aberration-corrected scanning transmission electron microscope. We discuss how such top-down observations have led to the concept of controllable, beam-induced processes and then of bottom-up, atom-by-atom assembly via electron-beam control. The progress in this field, from electron-beam-induced material transformations to atomically precise doping and multi-atom assembly, is reviewed, as are the associated engineering, theoretical and big-data challenges.

Original language	English
Pages (from-to)	497-507
Number of pages	11
Journal	Nature Reviews Materials
Volume	4
Issue number	7
DOIs	https://doi.org/10.1038/s41578-019-0118-z
State	Published - Jul 1 2019

Funding

This work was supported by the Laboratory Directed Research and Development program of Oak Ridge National Laboratory, managed by UT-Battelle, LLC for the U.S. Department of Energy (O.D., M.Z., S.J.), Oak Ridge National Laboratory’s Center for Nanophase Materials Sciences (CNMS), a U.S. Department of Energy Office of Science user facility (D.L. R.R.U., S.V.K.) and the U.S. Department of Energy, Office of Science, Basic Energy Sciences, Division of Materials Science and Engineering (B.M.H., A.R.L.).

Funders	Funder number
CNMS
Division of Materials Science and Engineering
Oak Ridge National Laboratory
U.S. Department of Energy Office of Science
UT-Battelle
U.S. Department of Energy
Office of Science
Basic Energy Sciences
Oak Ridge National Laboratory

Access to Document

10.1038/s41578-019-0118-z

Cite this

@article{60e91f7c9b574f27971fc8f2837b1d72,

title = "Atom-by-atom fabrication with electron beams",

abstract = "Assembling matter atom-by-atom into functional devices is the ultimate goal of nanotechnology. The possibility of achieving this goal is intrinsically dependent on the ability to visualize matter at the atomic level, induce and control atomic-scale motion, facilitate and direct chemical reactions, and coordinate and guide fabrication processes towards desired structures atom-by-atom. In this Perspective, we summarize recent progress in chemical transformations, material alterations and atomic dynamics studies enabled by the converged, atomic-sized electron beam of an aberration-corrected scanning transmission electron microscope. We discuss how such top-down observations have led to the concept of controllable, beam-induced processes and then of bottom-up, atom-by-atom assembly via electron-beam control. The progress in this field, from electron-beam-induced material transformations to atomically precise doping and multi-atom assembly, is reviewed, as are the associated engineering, theoretical and big-data challenges.",

author = "Ondrej Dyck and Maxim Ziatdinov and Lingerfelt, {David B.} and Unocic, {Raymond R.} and Hudak, {Bethany M.} and Lupini, {Andrew R.} and Stephen Jesse and Kalinin, {Sergei V.}",

note = "Publisher Copyright: {\textcopyright} 2019, This is a U.S. government work and not under copyright protection in the U.S.; foreign copyright protection may apply.",

year = "2019",

month = jul,

day = "1",

doi = "10.1038/s41578-019-0118-z",

language = "English",

volume = "4",

pages = "497--507",

journal = "Nature Reviews Materials",

issn = "2058-8437",

publisher = "Nature Research",

number = "7",

}

TY - JOUR

T1 - Atom-by-atom fabrication with electron beams

AU - Dyck, Ondrej

AU - Ziatdinov, Maxim

AU - Lingerfelt, David B.

AU - Unocic, Raymond R.

AU - Hudak, Bethany M.

AU - Lupini, Andrew R.

AU - Jesse, Stephen

AU - Kalinin, Sergei V.

PY - 2019/7/1

Y1 - 2019/7/1

N2 - Assembling matter atom-by-atom into functional devices is the ultimate goal of nanotechnology. The possibility of achieving this goal is intrinsically dependent on the ability to visualize matter at the atomic level, induce and control atomic-scale motion, facilitate and direct chemical reactions, and coordinate and guide fabrication processes towards desired structures atom-by-atom. In this Perspective, we summarize recent progress in chemical transformations, material alterations and atomic dynamics studies enabled by the converged, atomic-sized electron beam of an aberration-corrected scanning transmission electron microscope. We discuss how such top-down observations have led to the concept of controllable, beam-induced processes and then of bottom-up, atom-by-atom assembly via electron-beam control. The progress in this field, from electron-beam-induced material transformations to atomically precise doping and multi-atom assembly, is reviewed, as are the associated engineering, theoretical and big-data challenges.

AB - Assembling matter atom-by-atom into functional devices is the ultimate goal of nanotechnology. The possibility of achieving this goal is intrinsically dependent on the ability to visualize matter at the atomic level, induce and control atomic-scale motion, facilitate and direct chemical reactions, and coordinate and guide fabrication processes towards desired structures atom-by-atom. In this Perspective, we summarize recent progress in chemical transformations, material alterations and atomic dynamics studies enabled by the converged, atomic-sized electron beam of an aberration-corrected scanning transmission electron microscope. We discuss how such top-down observations have led to the concept of controllable, beam-induced processes and then of bottom-up, atom-by-atom assembly via electron-beam control. The progress in this field, from electron-beam-induced material transformations to atomically precise doping and multi-atom assembly, is reviewed, as are the associated engineering, theoretical and big-data challenges.

UR - http://www.scopus.com/inward/record.url?scp=85067273593&partnerID=8YFLogxK

U2 - 10.1038/s41578-019-0118-z

DO - 10.1038/s41578-019-0118-z

M3 - Article

AN - SCOPUS:85067273593

SN - 2058-8437

VL - 4

SP - 497

EP - 507

JO - Nature Reviews Materials

JF - Nature Reviews Materials

IS - 7

ER -

Atom-by-atom fabrication with electron beams

Abstract

Funding

Access to Document

Other files and links

Fingerprint

Cite this