Atom-by-atom fabrication by electron beam via induced phase transformations

Nan Jiang, Eva Zarkadoula, Prineha Narang, Artem Maksov, Ivan Kravchenko, Albina Borisevich, Stephen Jesse, Sergei V. Kalinin

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

New developments in manufacturing and automation, from three-dimensional printing to the Internet of things, signify dramatic changes in our society. The push toward quantum materials is driving device fabrication toward atomic precision. Recent results suggest that scanning transmission electron microscopy (STEM) with sub-angstrom scale beams could offer a solution. However, a detailed theoretical understanding of the interaction of the electron beam with solids is needed to form a basis for new technology. This article summarizes the existing literature on electron-beam interactions with solids with a focus on irreversible transformation. We further suggest that the theoretical framework of a two-temperature model developed for fast ion damage in solids could be applicable to predicting the effects of fast electrons. Recent results from STEM-directed epitaxial growth on crystalline-amorphous interfaces are discussed in detail. Finally, perspectives on the development of this field in the near future are offered.

Original languageEnglish
Pages (from-to)653-659
Number of pages7
JournalMRS Bulletin
Volume42
Issue number9
DOIs
StatePublished - Sep 1 2017

Keywords

  • electron irradiation
  • epitaxy
  • ion-solid interactions
  • nanostructure
  • scanning transmission electron microscopy

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