Analysis of nano-scale stress in strained silicon materials and microelectronics devices by energy-filtered convergent beam electron diffraction
Peng Zhang, Andrei A. Istratov, Haifeng He, Joel W. Ager, Chris Nelson, Eric Stach, John Mardinly, Christian Kisielowski, Eicke R. Weber, John C.H. Spence
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
4Scopus
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