Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction

Peng Zhang; John Mardinly; Oleh Karpenko; Andrei Istratov; Haifeng He; Joel Ager; Chris Nelson; Eric Stach; Christian Kisielowski; Eicke Weber; John Spence

doi:10.1017/S1431927606062222

Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction

Peng Zhang, John Mardinly, Oleh Karpenko, Andrei Istratov, Haifeng He, Joel Ager, Chris Nelson, Eric Stach, Christian Kisielowski, Eicke Weber, John Spence

electron Microscopy and Microanalysis

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	938-939
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	12
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S1431927606062222
State	Published - Aug 2006

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10.1017/S1431927606062222

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title = "Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction",

author = "Peng Zhang and John Mardinly and Oleh Karpenko and Andrei Istratov and Haifeng He and Joel Ager and Chris Nelson and Eric Stach and Christian Kisielowski and Eicke Weber and John Spence",

year = "2006",

month = aug,

doi = "10.1017/S1431927606062222",

language = "English",

volume = "12",

pages = "938--939",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

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T1 - Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction

AU - Zhang, Peng

AU - Mardinly, John

AU - Karpenko, Oleh

AU - Istratov, Andrei

AU - He, Haifeng

AU - Ager, Joel

AU - Nelson, Chris

AU - Stach, Eric

AU - Kisielowski, Christian

AU - Weber, Eicke

AU - Spence, John

PY - 2006/8

Y1 - 2006/8

UR - https://www.scopus.com/pages/publications/33750848785

U2 - 10.1017/S1431927606062222

DO - 10.1017/S1431927606062222

M3 - Article

AN - SCOPUS:33750848785

SN - 1431-9276

VL - 12

SP - 938

EP - 939

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - SUPPL. 2

ER -

Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction

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