@article{5b0f479967aa4a7bbef808404b0d636c,
title = "Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction",
author = "Peng Zhang and John Mardinly and Oleh Karpenko and Andrei Istratov and Haifeng He and Joel Ager and Chris Nelson and Eric Stach and Christian Kisielowski and Eicke Weber and John Spence",
year = "2006",
month = aug,
doi = "10.1017/S1431927606062222",
language = "English",
volume = "12",
pages = "938--939",
journal = "Microscopy and Microanalysis",
issn = "1431-9276",
publisher = "Oxford University Press",
number = "SUPPL. 2",
}