@inproceedings{e018be6703f94c3b80767f68fb43b6cd,
title = "An industry survey of automatic defect classification technologies, methods, and performance",
keywords = "Automatic defect classification, Control, Industry survey, Inspection, Process characterization, Semiconductor manufacturing, Yield leaming",
author = "KW Tobin and F Lakhani and TP Karnowski",
year = "2002",
language = "American English",
pages = "46--53",
editor = "A Starikov and KW Tobin",
booktitle = "Design, Process Integration, And Characterization For Microelectronics",
}