An application of image retrieval technology to sidewall structure estimation from top-down scanning electron microscopy imagery

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@article{9a1aeac540444606884600eb37e47785,

title = "An application of image retrieval technology to sidewall structure estimation from top-down scanning electron microscopy imagery",

author = "Tobin, \{K. W.\} and Bingham, \{P. R.\} and Price, \{J. R.\} and Bennett, \{M. H.\}",

year = "2001",

language = "English",

volume = "23",

pages = "91--92",

journal = "Scanning",

issn = "0161-0457",

publisher = "Hindawi",

number = "2",

}

TY - JOUR

T1 - An application of image retrieval technology to sidewall structure estimation from top-down scanning electron microscopy imagery

AU - Tobin, K. W.

AU - Bingham, P. R.

AU - Price, J. R.

AU - Bennett, M. H.

PY - 2001

Y1 - 2001

UR - https://www.scopus.com/pages/publications/0005093222

M3 - Article

AN - SCOPUS:0005093222

SN - 0161-0457

VL - 23

SP - 91

EP - 92

JO - Scanning

JF - Scanning

IS - 2

ER -