An application of image retrieval technology to sidewall structure estimation from top-down scanning electron microscopy imagery

K. W. Tobin, P. R. Bingham, J. R. Price, M. H. Bennett

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Cite this

@article{9a1aeac540444606884600eb37e47785,

title = "An application of image retrieval technology to sidewall structure estimation from top-down scanning electron microscopy imagery",

author = "Tobin, {K. W.} and Bingham, {P. R.} and Price, {J. R.} and Bennett, {M. H.}",

year = "2001",

language = "English",

volume = "23",

pages = "91--92",

journal = "Scanning",

issn = "0161-0457",

publisher = "Hindawi",

number = "2",

}

TY - JOUR

T1 - An application of image retrieval technology to sidewall structure estimation from top-down scanning electron microscopy imagery

AU - Tobin, K. W.

AU - Bingham, P. R.

AU - Price, J. R.

AU - Bennett, M. H.

PY - 2001

Y1 - 2001

UR - http://www.scopus.com/inward/record.url?scp=0005093222&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0005093222

SN - 0161-0457

VL - 23

SP - 91

EP - 92

JO - Scanning

JF - Scanning

IS - 2

ER -