Amorphous boron coatings produced with vacuum arc deposition technology

C. C. Klepper; R. C. Hazelton; E. J. Yadlowsky; E. P. Carlson; M. D. Keitz; J. M. Williams; R. A. Zuhr; D. B. Poker

doi:10.1116/1.1464844

Amorphous boron coatings produced with vacuum arc deposition technology

C. C. Klepper, R. C. Hazelton, E. J. Yadlowsky, E. P. Carlson, M. D. Keitz, J. M. Williams, R. A. Zuhr, D. B. Poker

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52 Scopus citations

Abstract

Vacuum (cathodic) arc deposition of hard, impact resistant, amorphous boron coatings from solid boron feedstock is demonstrated. The deposition is compatible with continuous operation and scalable for manufacturing environments. The properties of the arc-deposited boron films are strongly suggestive of a boron suboxide stoichiometry. Preliminary results suggest biocompatibility of boron and potential advantages as a coating for biomedical implant applications.

Original language	English
Pages (from-to)	725-732
Number of pages	8
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	20
Issue number	3
DOIs	https://doi.org/10.1116/1.1464844
State	Published - May 2002
Externally published	Yes

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abstract = "Vacuum (cathodic) arc deposition of hard, impact resistant, amorphous boron coatings from solid boron feedstock is demonstrated. The deposition is compatible with continuous operation and scalable for manufacturing environments. The properties of the arc-deposited boron films are strongly suggestive of a boron suboxide stoichiometry. Preliminary results suggest biocompatibility of boron and potential advantages as a coating for biomedical implant applications.",

author = "Klepper, {C. C.} and Hazelton, {R. C.} and Yadlowsky, {E. J.} and Carlson, {E. P.} and Keitz, {M. D.} and Williams, {J. M.} and Zuhr, {R. A.} and Poker, {D. B.}",

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AU - Yadlowsky, E. J.

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AU - Keitz, M. D.

AU - Williams, J. M.

AU - Zuhr, R. A.

AU - Poker, D. B.

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AB - Vacuum (cathodic) arc deposition of hard, impact resistant, amorphous boron coatings from solid boron feedstock is demonstrated. The deposition is compatible with continuous operation and scalable for manufacturing environments. The properties of the arc-deposited boron films are strongly suggestive of a boron suboxide stoichiometry. Preliminary results suggest biocompatibility of boron and potential advantages as a coating for biomedical implant applications.

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Amorphous boron coatings produced with vacuum arc deposition technology

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