@inproceedings{3ab602de145f4b8d9bde89fa386c6283,
title = "Advanced matrix-based algorithm for ion-beam milling of optical components",
abstract = "Control of an ion beam for milling optical surfaces is a nontrivial problem in two-dimensional deconvolution. The ion milling operation is performed by moving an ion beam gun through a grid of points over the surface of an optical workpiece. The control problem is to determine the amount of time to dwell at each point in the grid to obtain a desired surface profile. This research treats the problem in linear algebra terms. The required dwell times are the solutions to a large, sparse system of linear equations. Traditional factorization methods such as Gaussian elimination cannot be used because the linear equations are severely ill conditioned. Theoretically, a least-squares solution to this problem exists. Practical approaches to finding a minimal least-squares solution are discussed.",
author = "Carnal, {Charles L.} and Egert, {Charles M.} and Hylton, {Kathy W.}",
year = "1992",
language = "English",
isbn = "0819409251",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Publ by Int Soc for Optical Engineering",
pages = "54--62",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Current Developments in Optical Design and Optical Engineering II ; Conference date: 20-07-1992 Through 21-07-1992",
}