Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers

G. Y. Chen; T. Thundat; E. A. Wachter; R. J. Warmack

doi:10.1063/1.359562

Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers

G. Y. Chen, T. Thundat, E. A. Wachter, R. J. Warmack

Research output: Contribution to journal › Article › peer-review

534 Scopus citations

Abstract

It is well known that bimetallic microcantilevers can exhibit static deflection as a result of thermal effects, including exothermic adsorption of chemicals on their surfaces. It is shown here that the resonance frequency of a cantilever can change due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending that is induced by differential surface stress. The magnitude of these effects depends upon the chemical properties of the surface and upon the amount of material adsorbed. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemical sensors.

Original language	English
Pages (from-to)	3618-3622
Number of pages	5
Journal	Journal of Applied Physics
Volume	77
Issue number	8
DOIs	https://doi.org/10.1063/1.359562
State	Published - 1995
Externally published	Yes

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AU - Warmack, R. J.

PY - 1995

Y1 - 1995

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AB - It is well known that bimetallic microcantilevers can exhibit static deflection as a result of thermal effects, including exothermic adsorption of chemicals on their surfaces. It is shown here that the resonance frequency of a cantilever can change due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending that is induced by differential surface stress. The magnitude of these effects depends upon the chemical properties of the surface and upon the amount of material adsorbed. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemical sensors.

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Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers

Abstract

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