Ablation of sub-100-nm features with a tabletop soft X-ray laser

F. Brizuela; H. Bravo; M. Berrill; G. Vaschenko; B. Longhon; E. H. Anderson; W. Chao; D. T. Attwood; O. Hemberg; S. Bloom; J. J. Rocca; C. S. Menoni

doi:10.1364/OPN.18.12.000045

Ablation of sub-100-nm features with a tabletop soft X-ray laser

F. Brizuela
, H. Bravo
, M. Berrill
, G. Vaschenko
, B. Longhon
, E. H. Anderson
, W. Chao
, D. T. Attwood
, O. Hemberg
, S. Bloom
, J. J. Rocca
, C. S. Menoni

Research output: Contribution to journal › Comment/debate

Original language	English
Pages (from-to)	45
Number of pages	1
Journal	Optics and Photonics News
Volume	18
Issue number	12
DOIs	https://doi.org/10.1364/OPN.18.12.000045
State	Published - Dec 2007
Externally published	Yes

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10.1364/OPN.18.12.000045

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@article{04223c07164c4268b8ae69df35574931,

title = "Ablation of sub-100-nm features with a tabletop soft X-ray laser",

author = "F. Brizuela and H. Bravo and M. Berrill and G. Vaschenko and B. Longhon and Anderson, \{E. H.\} and W. Chao and Attwood, \{D. T.\} and O. Hemberg and S. Bloom and Rocca, \{J. J.\} and Menoni, \{C. S.\}",

year = "2007",

month = dec,

doi = "10.1364/OPN.18.12.000045",

language = "English",

volume = "18",

pages = "45",

journal = "Optics and Photonics News",

issn = "1047-6938",

number = "12",

}

TY - JOUR

T1 - Ablation of sub-100-nm features with a tabletop soft X-ray laser

AU - Brizuela, F.

AU - Bravo, H.

AU - Berrill, M.

AU - Vaschenko, G.

AU - Longhon, B.

AU - Anderson, E. H.

AU - Chao, W.

AU - Attwood, D. T.

AU - Hemberg, O.

AU - Bloom, S.

AU - Rocca, J. J.

AU - Menoni, C. S.

PY - 2007/12

Y1 - 2007/12

UR - https://www.scopus.com/pages/publications/39149089673

U2 - 10.1364/OPN.18.12.000045

DO - 10.1364/OPN.18.12.000045

M3 - Comment/debate

AN - SCOPUS:39149089673

SN - 1047-6938

VL - 18

SP - 45

JO - Optics and Photonics News

JF - Optics and Photonics News

IS - 12

ER -

Ablation of sub-100-nm features with a tabletop soft X-ray laser

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