Ablation of sub-100-nm features with a tabletop soft X-ray laser

F. Brizuela; H. Bravo; M. Berrill; G. Vaschenko; B. Longhon; E. H. Anderson; W. Chao; D. T. Attwood; O. Hemberg; S. Bloom; J. J. Rocca; C. S. Menoni

doi:10.1364/OPN.18.12.000045

Ablation of sub-100-nm features with a tabletop soft X-ray laser

F. Brizuela, H. Bravo, M. Berrill, G. Vaschenko, B. Longhon, E. H. Anderson, W. Chao, D. T. Attwood, O. Hemberg, S. Bloom, J. J. Rocca, C. S. Menoni

Research output: Contribution to journal › Comment/debate

Original language	English
Pages (from-to)	45
Number of pages	1
Journal	Optics and Photonics News
Volume	18
Issue number	12
DOIs	https://doi.org/10.1364/OPN.18.12.000045
State	Published - Dec 2007
Externally published	Yes

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10.1364/OPN.18.12.000045

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@article{04223c07164c4268b8ae69df35574931,

title = "Ablation of sub-100-nm features with a tabletop soft X-ray laser",

author = "F. Brizuela and H. Bravo and M. Berrill and G. Vaschenko and B. Longhon and Anderson, {E. H.} and W. Chao and Attwood, {D. T.} and O. Hemberg and S. Bloom and Rocca, {J. J.} and Menoni, {C. S.}",

year = "2007",

month = dec,

doi = "10.1364/OPN.18.12.000045",

language = "English",

volume = "18",

pages = "45",

journal = "Optics and Photonics News",

issn = "1047-6938",

number = "12",

}

TY - JOUR

T1 - Ablation of sub-100-nm features with a tabletop soft X-ray laser

AU - Brizuela, F.

AU - Bravo, H.

AU - Berrill, M.

AU - Vaschenko, G.

AU - Longhon, B.

AU - Anderson, E. H.

AU - Chao, W.

AU - Attwood, D. T.

AU - Hemberg, O.

AU - Bloom, S.

AU - Rocca, J. J.

AU - Menoni, C. S.

PY - 2007/12

Y1 - 2007/12

UR - http://www.scopus.com/inward/record.url?scp=39149089673&partnerID=8YFLogxK

U2 - 10.1364/OPN.18.12.000045

DO - 10.1364/OPN.18.12.000045

M3 - Comment/debate

AN - SCOPUS:39149089673

SN - 1047-6938

VL - 18

SP - 45

JO - Optics and Photonics News

JF - Optics and Photonics News

IS - 12

ER -

Ablation of sub-100-nm features with a tabletop soft X-ray laser

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