Aberration-corrected STEM: Current performance and future directions

P. D. Nellist; M. F. Chisholm; A. R. Lupini; A. Borisevich; W. H. Sides; S. J. Pennycook; N. Dellby; R. Keyse; O. L. Krivanek; M. F. Murfitt; Z. S. Szilagyi

doi:10.1088/1742-6596/26/1/002

Aberration-corrected STEM: Current performance and future directions

P. D. Nellist, M. F. Chisholm, A. R. Lupini, A. Borisevich, W. H. Sides, S. J. Pennycook, N. Dellby, R. Keyse, O. L. Krivanek, M. F. Murfitt, Z. S. Szilagyi

electron Microscopy and Microanalysis

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

Through the correction of spherical aberration in the scanning transmission electron microscope (STEM), the resolving of a 78 pm atomic column spacing has been demonstrated along with information transfer to 61 pm. The achievement of this resolution required careful control of microscope instabilities, parasitic aberrations and the compensation of uncorrected, higher order aberrations. Many of these issues are improved in a next generation STEM fitted with a new design of aberration corrector, and an initial result demonstrating aberration correction to a convergence semi-angle of 40 mrad is shown. The improved spatial resolution and beam convergence allowed for by such correction has implications for the way in which experiments are performed and how STEM data should be interpreted.

Original language	English
Pages (from-to)	7-12
Number of pages	6
Journal	Journal of Physics: Conference Series
Volume	26
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/26/1/002
State	Published - Jan 1 2006

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@article{9af0571603784dc3bbec2c0f92912f6b,

title = "Aberration-corrected STEM: Current performance and future directions",

abstract = "Through the correction of spherical aberration in the scanning transmission electron microscope (STEM), the resolving of a 78 pm atomic column spacing has been demonstrated along with information transfer to 61 pm. The achievement of this resolution required careful control of microscope instabilities, parasitic aberrations and the compensation of uncorrected, higher order aberrations. Many of these issues are improved in a next generation STEM fitted with a new design of aberration corrector, and an initial result demonstrating aberration correction to a convergence semi-angle of 40 mrad is shown. The improved spatial resolution and beam convergence allowed for by such correction has implications for the way in which experiments are performed and how STEM data should be interpreted.",

author = "Nellist, {P. D.} and Chisholm, {M. F.} and Lupini, {A. R.} and A. Borisevich and Sides, {W. H.} and Pennycook, {S. J.} and N. Dellby and R. Keyse and Krivanek, {O. L.} and Murfitt, {M. F.} and Szilagyi, {Z. S.}",

year = "2006",

month = jan,

day = "1",

doi = "10.1088/1742-6596/26/1/002",

language = "English",

volume = "26",

pages = "7--12",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

number = "1",

}

TY - JOUR

T1 - Aberration-corrected STEM

T2 - Current performance and future directions

AU - Nellist, P. D.

AU - Chisholm, M. F.

AU - Lupini, A. R.

AU - Borisevich, A.

AU - Sides, W. H.

AU - Pennycook, S. J.

AU - Dellby, N.

AU - Keyse, R.

AU - Krivanek, O. L.

AU - Murfitt, M. F.

AU - Szilagyi, Z. S.

PY - 2006/1/1

Y1 - 2006/1/1

N2 - Through the correction of spherical aberration in the scanning transmission electron microscope (STEM), the resolving of a 78 pm atomic column spacing has been demonstrated along with information transfer to 61 pm. The achievement of this resolution required careful control of microscope instabilities, parasitic aberrations and the compensation of uncorrected, higher order aberrations. Many of these issues are improved in a next generation STEM fitted with a new design of aberration corrector, and an initial result demonstrating aberration correction to a convergence semi-angle of 40 mrad is shown. The improved spatial resolution and beam convergence allowed for by such correction has implications for the way in which experiments are performed and how STEM data should be interpreted.

AB - Through the correction of spherical aberration in the scanning transmission electron microscope (STEM), the resolving of a 78 pm atomic column spacing has been demonstrated along with information transfer to 61 pm. The achievement of this resolution required careful control of microscope instabilities, parasitic aberrations and the compensation of uncorrected, higher order aberrations. Many of these issues are improved in a next generation STEM fitted with a new design of aberration corrector, and an initial result demonstrating aberration correction to a convergence semi-angle of 40 mrad is shown. The improved spatial resolution and beam convergence allowed for by such correction has implications for the way in which experiments are performed and how STEM data should be interpreted.

UR - http://www.scopus.com/inward/record.url?scp=33644535099&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/26/1/002

DO - 10.1088/1742-6596/26/1/002

M3 - Article

AN - SCOPUS:33644535099

SN - 1742-6588

VL - 26

SP - 7

EP - 12

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 1

ER -

Aberration-corrected STEM: Current performance and future directions

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