@inproceedings{0b32b95fcb2f4a1c869b6701b951f0e8,
title = "A survey of semiconductor data management systems technology",
keywords = "Automatic defect classification, Data management system, Database, Datamining, Industry survey, Knowledge discovery, Spatial signature analysis, Statistical process control, Yield management",
author = "KW Tobin and TP Karnowski and F Lakhani",
year = "2000",
language = "American English",
pages = "248--257",
editor = "NT Sullivan",
booktitle = "Metrology, Inspection, And Process Control For Microlithography Xiv",
}