A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography

S. K. Islam; S. A. Eliza; N. D. Bull; T. Rahman; B. Blalock; L. R. Baylor; M. N. Ericson; W. L. Gardner

doi:10.1109/IVNC.2009.5271585

A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography

S. K. Islam
, S. A. Eliza
, N. D. Bull
, T. Rahman
, B. Blalock
, L. R. Baylor
, M. N. Ericson
, W. L. Gardner

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Original language	English
Title of host publication	Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009
Pages	199-200
Number of pages	2
DOIs	https://doi.org/10.1109/IVNC.2009.5271585
State	Published - 2009
Event	2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009 - Hamamatsu, Japan Duration: Jul 20 2009 → Jul 24 2009

Publication series

Name	Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009

Conference

Conference	2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009
Country/Territory	Japan
City	Hamamatsu
Period	07/20/09 → 07/24/09

Access to Document

10.1109/IVNC.2009.5271585

Cite this

Islam, S. K., Eliza, S. A., Bull, N. D., Rahman, T., Blalock, B., Baylor, L. R., Ericson, M. N., & Gardner, W. L. (2009). A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography. In Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009 (pp. 199-200). Article 5271585 (Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009). https://doi.org/10.1109/IVNC.2009.5271585

@inproceedings{91ada67a509646768826bafdd3ce4384,

title = "A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography",

author = "Islam, \{S. K.\} and Eliza, \{S. A.\} and Bull, \{N. D.\} and T. Rahman and B. Blalock and Baylor, \{L. R.\} and Ericson, \{M. N.\} and Gardner, \{W. L.\}",

year = "2009",

doi = "10.1109/IVNC.2009.5271585",

language = "English",

isbn = "9781424435883",

series = "Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009",

pages = "199--200",

booktitle = "Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009",

note = "2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009 ; Conference date: 20-07-2009 Through 24-07-2009",

}

Islam, SK, Eliza, SA, Bull, ND, Rahman, T, Blalock, B, Baylor, LR , Ericson, MN & Gardner, WL 2009, A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography. in Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009., 5271585, Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009, pp. 199-200, 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009, Hamamatsu, Japan, 07/20/09. https://doi.org/10.1109/IVNC.2009.5271585

A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography. / Islam, S. K.; Eliza, S. A.; Bull, N. D. et al.
Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009. 2009. p. 199-200 5271585 (Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography

AU - Islam, S. K.

AU - Eliza, S. A.

AU - Bull, N. D.

AU - Rahman, T.

AU - Blalock, B.

AU - Baylor, L. R.

AU - Ericson, M. N.

AU - Gardner, W. L.

PY - 2009

Y1 - 2009

UR - https://www.scopus.com/pages/publications/70449864836

U2 - 10.1109/IVNC.2009.5271585

DO - 10.1109/IVNC.2009.5271585

M3 - Conference contribution

AN - SCOPUS:70449864836

SN - 9781424435883

T3 - Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009

SP - 199

EP - 200

BT - Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009

T2 - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009

Y2 - 20 July 2009 through 24 July 2009

ER -

Islam SK, Eliza SA, Bull ND, Rahman T, Blalock B, Baylor LR et al. A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography. In Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009. 2009. p. 199-200. 5271585. (Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009). doi: 10.1109/IVNC.2009.5271585

A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography

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