A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography

S. K. Islam; S. A. Eliza; N. D. Bull; T. Rahman; B. Blalock; L. R. Baylor; M. N. Ericson; W. L. Gardner

doi:10.1109/IVNC.2009.5271585

A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography

S. K. Islam, S. A. Eliza, N. D. Bull, T. Rahman, B. Blalock, L. R. Baylor, M. N. Ericson, W. L. Gardner

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Original language	English
Title of host publication	Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009
Pages	199-200
Number of pages	2
DOIs	https://doi.org/10.1109/IVNC.2009.5271585
State	Published - 2009
Event	2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009 - Hamamatsu, Japan Duration: Jul 20 2009 → Jul 24 2009

Publication series

Name	Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009

Conference

Conference	2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009
Country/Territory	Japan
City	Hamamatsu
Period	07/20/09 → 07/24/09

Access to Document

10.1109/IVNC.2009.5271585

Cite this

Islam, S. K., Eliza, S. A., Bull, N. D., Rahman, T., Blalock, B., Baylor, L. R., Ericson, M. N., & Gardner, W. L. (2009). A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography. In Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009 (pp. 199-200). Article 5271585 (Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009). https://doi.org/10.1109/IVNC.2009.5271585

@inproceedings{91ada67a509646768826bafdd3ce4384,

title = "A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography",

author = "Islam, {S. K.} and Eliza, {S. A.} and Bull, {N. D.} and T. Rahman and B. Blalock and Baylor, {L. R.} and Ericson, {M. N.} and Gardner, {W. L.}",

year = "2009",

doi = "10.1109/IVNC.2009.5271585",

language = "English",

isbn = "9781424435883",

series = "Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009",

pages = "199--200",

booktitle = "Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009",

note = "2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009 ; Conference date: 20-07-2009 Through 24-07-2009",

}

Islam, SK, Eliza, SA, Bull, ND, Rahman, T, Blalock, B, Baylor, LR , Ericson, MN & Gardner, WL 2009, A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography. in Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009., 5271585, Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009, pp. 199-200, 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009, Hamamatsu, Japan, 07/20/09. https://doi.org/10.1109/IVNC.2009.5271585

A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography. / Islam, S. K.; Eliza, S. A.; Bull, N. D. et al.
Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009. 2009. p. 199-200 5271585 (Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography

AU - Islam, S. K.

AU - Eliza, S. A.

AU - Bull, N. D.

AU - Rahman, T.

AU - Blalock, B.

AU - Baylor, L. R.

AU - Ericson, M. N.

AU - Gardner, W. L.

PY - 2009

Y1 - 2009

UR - http://www.scopus.com/inward/record.url?scp=70449864836&partnerID=8YFLogxK

U2 - 10.1109/IVNC.2009.5271585

DO - 10.1109/IVNC.2009.5271585

M3 - Conference contribution

AN - SCOPUS:70449864836

SN - 9781424435883

T3 - Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009

SP - 199

EP - 200

BT - Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009

T2 - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009

Y2 - 20 July 2009 through 24 July 2009

ER -

Islam SK, Eliza SA, Bull ND, Rahman T, Blalock B, Baylor LR et al. A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography. In Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009. 2009. p. 199-200. 5271585. (Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009). doi: 10.1109/IVNC.2009.5271585

A precision dose control circuit for vertically aligned carbon nanofiber based maskless lithography

Publication series

Conference

Access to Document

Other files and links

Cite this