A Multichannel Depth Probe Fabricated Using Electron-Beam Lithography

Phillip Pochay; Kensall D. Wise; Lawrence F. Allard; Lester T. Rutledge

doi:10.1109/TBME.1979.326558

A Multichannel Depth Probe Fabricated Using Electron-Beam Lithography

Phillip Pochay, Kensall D. Wise, Lawrence F. Allard, Lester T. Rutledge

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

A multielectrode probe structure is described in which several thin-film metal electrodes are defined on the outer surface of a glass micropipette using electron-beam lithography. Electrode geometries are controlled to within one micron, resulting in electrode recording characteristics which are extremely well matched. Recording sites are 5 μm wide rings spaced 100 μm apart in depth. Analysis and characterization show the structure to be capable of accurately recording tissue potentials with a minimum of tissue damage. Use of these probes in current source-density (CSD) analysis of extracellular current flow is described.

Original language	English
Pages (from-to)	199-206
Number of pages	8
Journal	IEEE Transactions on Biomedical Engineering
Volume	BME-26
Issue number	4
DOIs	https://doi.org/10.1109/TBME.1979.326558
State	Published - Apr 1979
Externally published	Yes

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A Multichannel Depth Probe Fabricated Using Electron-Beam Lithography

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