A micro-scale plasma spectrometer for space and plasma edge applications (invited)

E. E. Scime; A. M. Keesee; M. Dugas; S. Ellison; J. Tersteeg; G. Wagner; A. Barrie; A. Rager; D. Elliott

doi:10.1063/1.4960145

A micro-scale plasma spectrometer for space and plasma edge applications (invited)

E. E. Scime
, A. M. Keesee
, M. Dugas
, S. Ellison
, J. Tersteeg
, G. Wagner
, A. Barrie
, A. Rager
, D. Elliott

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A plasma spectrometer design based on advances in lithography and microchip stacking technologies is described. A series of curved plate energy analyzers, with an integrated collimator, is etched into a silicon wafer. Tests of spectrometer elements, the energy analyzer and collimator, were performed with a 5 keV electron beam. The measured collimator transmission and energy selectivity were in good agreement with design targets. A single wafer element could be used as a plasma processing or fusion first wall diagnostic.

Original language	English
Article number	11D302
Journal	Review of Scientific Instruments
Volume	87
Issue number	11
DOIs	https://doi.org/10.1063/1.4960145
State	Published - Nov 1 2016
Externally published	Yes

Funding

This work was supported by NASA Award NNX14AJ36G and Department of Energy Award DE-SC0013841.

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10.1063/1.4960145

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AU - Scime, E. E.

AU - Keesee, A. M.

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AU - Tersteeg, J.

AU - Wagner, G.

AU - Barrie, A.

AU - Rager, A.

AU - Elliott, D.

PY - 2016/11/1

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AB - A plasma spectrometer design based on advances in lithography and microchip stacking technologies is described. A series of curved plate energy analyzers, with an integrated collimator, is etched into a silicon wafer. Tests of spectrometer elements, the energy analyzer and collimator, were performed with a 5 keV electron beam. The measured collimator transmission and energy selectivity were in good agreement with design targets. A single wafer element could be used as a plasma processing or fusion first wall diagnostic.

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A micro-scale plasma spectrometer for space and plasma edge applications (invited)

Abstract

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