A micro-scale plasma spectrometer for space and plasma edge applications (invited)

E. E. Scime; A. M. Keesee; M. Dugas; S. Ellison; J. Tersteeg; G. Wagner; A. Barrie; A. Rager; D. Elliott

doi:10.1063/1.4960145

A micro-scale plasma spectrometer for space and plasma edge applications (invited)

E. E. Scime, A. M. Keesee, M. Dugas, S. Ellison, J. Tersteeg, G. Wagner, A. Barrie, A. Rager, D. Elliott

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A plasma spectrometer design based on advances in lithography and microchip stacking technologies is described. A series of curved plate energy analyzers, with an integrated collimator, is etched into a silicon wafer. Tests of spectrometer elements, the energy analyzer and collimator, were performed with a 5 keV electron beam. The measured collimator transmission and energy selectivity were in good agreement with design targets. A single wafer element could be used as a plasma processing or fusion first wall diagnostic.

Original language	English
Article number	11D302
Journal	Review of Scientific Instruments
Volume	87
Issue number	11
DOIs	https://doi.org/10.1063/1.4960145
State	Published - Nov 1 2016
Externally published	Yes

Funding

This work was supported by NASA Award NNX14AJ36G and Department of Energy Award DE-SC0013841.

Funders	Funder number
U.S. Department of Energy	DE-SC0013841
National Aeronautics and Space Administration	NNX14AJ36G

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1063/1.4960145

Cite this

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AU - Scime, E. E.

AU - Keesee, A. M.

AU - Dugas, M.

AU - Ellison, S.

AU - Tersteeg, J.

AU - Wagner, G.

AU - Barrie, A.

AU - Rager, A.

AU - Elliott, D.

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A micro-scale plasma spectrometer for space and plasma edge applications (invited)

Abstract

Funding

UN SDGs

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