Abstract
A method was developed to quantify the spatial distribution and implantation depth of energy-degraded light ions with a thin foil rotating energy degrader for use during multiple ion beam irradiation. The methodology covers three physical phenomena: ions passing through the thin foil, ions travelling through the vacuum to the target, and ion implantation into the target, and accounts for the distribution of ions both in depth and in plane. The processes of energy straggling and scattering were calculated using SRIM. The effects of raster-scanning, and the geometry of the system were implemented in scripts handling the SRIM output files. Elastic backscattering (EBS) using 2.38 MeV H+ protons was used to measure the helium depth profiles after implantation with and without thin foil energy degradation. Defect analysis with transmission electron microscopy confirmed the implantation profiles measured with EBS and calculated with SRIM.
| Original language | English |
|---|---|
| Pages (from-to) | 274-283 |
| Number of pages | 10 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 478 |
| DOIs | |
| State | Published - Sep 1 2020 |
| Externally published | Yes |
Funding
This research is being performed using funding received from the DOE Office of Nuclear Energy's Nuclear Energy University Programs under contract DE-NE0000639. Support for S. Taller partially provided by a DOE NEUP Graduate Fellowship. The authors would like to thank Rigel Hanbury for his assistance in explaining and sharing his scripts for the Weka Segmentation analysis. The authors would also like to acknowledge NSF grant #DMR-0320740 for support of the JEOL 2100F S/TEM at the Michigan Center for Materials Characterization. Finally, the authors thank David Woodley, Samara Levine, Rigel Hanbury, Drew Johnson, and Miao Song for helping to keep the helium implantations running for 11 continuous days. This research is being performed using funding received from the DOE Office of Nuclear Energy's Nuclear Energy University Programs under contract DE-NE0000639. Support for S. Taller partially provided by a DOE NEUP Graduate Fellowship. The authors would like to thank Rigel Hanbury for his assistance in explaining and sharing his scripts for the Weka Segmentation analysis. The authors would also like to acknowledge NSF grant #DMR-0320740 for support of the JEOL 2100F S/TEM at the Michigan Center for Materials Characterization. Finally, the authors thank David Woodley, Samara Levine, Rigel Hanbury, Drew Johnson, and Miao Song for helping to keep the helium implantations running for 11 continuous days.
| Funders | Funder number |
|---|---|
| DOE NEUP | |
| DOE Office of Nuclear Energy | |
| Nuclear Energy University Programs | |
| National Science Foundation | -0320740 |
| U.S. Department of Energy | |
| Office of Nuclear Energy | |
| Nuclear Energy University Program | DE-NE0000639 |
Keywords
- Elastic backscattering
- Foil degrader
- Ion implantation
- Ion irradiation