A biomimetic approach to the deposition of ZrO2 films on self-assembled nanoscale templates

Guangneng Zhang; Jane Y. Howe; Dorothy W. Coffey; Douglas A. Blom; Lawrence F. Allard; Junghyun Cho

doi:10.1016/j.msec.2005.08.010

A biomimetic approach to the deposition of ZrO₂ films on self-assembled nanoscale templates

Guangneng Zhang, Jane Y. Howe, Dorothy W. Coffey, Douglas A. Blom, Lawrence F. Allard, Junghyun Cho

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Zirconium oxide thin films were deposited on a phosphonate-terminated self-assembled monolayer (SAM) on a single crystal silicon substrate by a hydrolysis of zirconium sulfate solution in acid environment at 80 °C. The ZrO₂ films consist of tetragonal ZrO₂ crystallites with a size of 5-10 nm. Surface nucleation and attraction between the SAM surface and bulk precipitates in solution can explain the film formation. In both mechanisms, the surface functionality of the SAM plays a crucial role. This deposition approach was inspired by biomineralization through controlled deposition of inorganic solids on an ordered organic matrix. Microstructures and mechanical properties of the ZrO₂ thin films were studied using scanning electron microscope (SEM), cross-sectional transmission electron microscope (TEM) and nanoindentation. Microstructures were tailored at different stages of the film growth, as well as with processing parameters and substrate surface conditions. The nanoindentation modulus and hardness of the as-deposited ZrO₂ films were much lower than those of the bulk ZrO₂. The addition of extra pressure during this process, however, restores mechanical properties of ZrO₂ films.

Original language	English
Pages (from-to)	1344-1350
Number of pages	7
Journal	Materials Science and Engineering C
Volume	26
Issue number	8
DOIs	https://doi.org/10.1016/j.msec.2005.08.010
State	Published - Sep 2006

Funding

This work was co-sponsored by the Semiconductor Research Corporation (SRC) under contract number SRC 2003-TJ-1068 (monitored by Dr. H. Hosack) and by the Microelectronics Design Center (MDC) under contract number C000063. The TEM research was sponsored by the Assistant Secretary for Energy Efficiency and Renewal Energy, Office of FreedomCAR and Vehicle Technologies, as part of the High Temperature Materials Laboratory User Program, Oak Ridge National Laboratory, managed by UT-Battelle, LLC, for the U.S. Department of Energy under contract number DE-AC05-00OR22725. GZ and JC would also like to thank Mr. T. Kanazawa at JEOL USA, Inc. for helping with high-resolution SEM work.

Keywords

Biomimetic
Biomineralization
Nanoindentation
Self-assembled monolayer
TEM
Zirconium oxide

Access to Document

10.1016/j.msec.2005.08.010

Cite this

@article{68702febf29d4bd09ac8002a7a9734de,

title = "A biomimetic approach to the deposition of ZrO2 films on self-assembled nanoscale templates",

abstract = "Zirconium oxide thin films were deposited on a phosphonate-terminated self-assembled monolayer (SAM) on a single crystal silicon substrate by a hydrolysis of zirconium sulfate solution in acid environment at 80 °C. The ZrO2 films consist of tetragonal ZrO2 crystallites with a size of 5-10 nm. Surface nucleation and attraction between the SAM surface and bulk precipitates in solution can explain the film formation. In both mechanisms, the surface functionality of the SAM plays a crucial role. This deposition approach was inspired by biomineralization through controlled deposition of inorganic solids on an ordered organic matrix. Microstructures and mechanical properties of the ZrO2 thin films were studied using scanning electron microscope (SEM), cross-sectional transmission electron microscope (TEM) and nanoindentation. Microstructures were tailored at different stages of the film growth, as well as with processing parameters and substrate surface conditions. The nanoindentation modulus and hardness of the as-deposited ZrO2 films were much lower than those of the bulk ZrO2. The addition of extra pressure during this process, however, restores mechanical properties of ZrO2 films.",

keywords = "Biomimetic, Biomineralization, Nanoindentation, Self-assembled monolayer, TEM, Zirconium oxide",

author = "Guangneng Zhang and Howe, {Jane Y.} and Coffey, {Dorothy W.} and Blom, {Douglas A.} and Allard, {Lawrence F.} and Junghyun Cho",

year = "2006",

month = sep,

doi = "10.1016/j.msec.2005.08.010",

language = "English",

volume = "26",

pages = "1344--1350",

journal = "Materials Science and Engineering C",

issn = "0928-4931",

publisher = "Elsevier",

number = "8",

}

TY - JOUR

T1 - A biomimetic approach to the deposition of ZrO2 films on self-assembled nanoscale templates

AU - Zhang, Guangneng

AU - Howe, Jane Y.

AU - Coffey, Dorothy W.

AU - Blom, Douglas A.

AU - Allard, Lawrence F.

AU - Cho, Junghyun

PY - 2006/9

Y1 - 2006/9

N2 - Zirconium oxide thin films were deposited on a phosphonate-terminated self-assembled monolayer (SAM) on a single crystal silicon substrate by a hydrolysis of zirconium sulfate solution in acid environment at 80 °C. The ZrO2 films consist of tetragonal ZrO2 crystallites with a size of 5-10 nm. Surface nucleation and attraction between the SAM surface and bulk precipitates in solution can explain the film formation. In both mechanisms, the surface functionality of the SAM plays a crucial role. This deposition approach was inspired by biomineralization through controlled deposition of inorganic solids on an ordered organic matrix. Microstructures and mechanical properties of the ZrO2 thin films were studied using scanning electron microscope (SEM), cross-sectional transmission electron microscope (TEM) and nanoindentation. Microstructures were tailored at different stages of the film growth, as well as with processing parameters and substrate surface conditions. The nanoindentation modulus and hardness of the as-deposited ZrO2 films were much lower than those of the bulk ZrO2. The addition of extra pressure during this process, however, restores mechanical properties of ZrO2 films.

AB - Zirconium oxide thin films were deposited on a phosphonate-terminated self-assembled monolayer (SAM) on a single crystal silicon substrate by a hydrolysis of zirconium sulfate solution in acid environment at 80 °C. The ZrO2 films consist of tetragonal ZrO2 crystallites with a size of 5-10 nm. Surface nucleation and attraction between the SAM surface and bulk precipitates in solution can explain the film formation. In both mechanisms, the surface functionality of the SAM plays a crucial role. This deposition approach was inspired by biomineralization through controlled deposition of inorganic solids on an ordered organic matrix. Microstructures and mechanical properties of the ZrO2 thin films were studied using scanning electron microscope (SEM), cross-sectional transmission electron microscope (TEM) and nanoindentation. Microstructures were tailored at different stages of the film growth, as well as with processing parameters and substrate surface conditions. The nanoindentation modulus and hardness of the as-deposited ZrO2 films were much lower than those of the bulk ZrO2. The addition of extra pressure during this process, however, restores mechanical properties of ZrO2 films.

KW - Biomimetic

KW - Biomineralization

KW - Nanoindentation

KW - Self-assembled monolayer

KW - TEM

KW - Zirconium oxide

UR - http://www.scopus.com/inward/record.url?scp=33746711561&partnerID=8YFLogxK

U2 - 10.1016/j.msec.2005.08.010

DO - 10.1016/j.msec.2005.08.010

M3 - Article

AN - SCOPUS:33746711561

SN - 0928-4931

VL - 26

SP - 1344

EP - 1350

JO - Materials Science and Engineering C

JF - Materials Science and Engineering C

IS - 8

ER -