Alex Ivanov

Publications

Publications per year 1981 2005 2012 2014 2015 2016 2017 2018 2020 2021 2022 2023 2024 2024

• 148 Article
• 24 Conference contribution
• 3 Conference article
• 3 Review article
• 4 More
  • 2 Technical Report
  • 1 Chapter
  • 1 Comment/debate

Publications per year

Publications per year

Search results

• 2006

  Xenon and tin pinch discharge sources

  Borisov, V. M., Demin, A. I., Eltsov, A. V., Ivanov, A. S., Kiryukhin, Y. B., Khristoforov, O. B., Mishchenko, V. A., Prokofiev, A. V., Vinokhodov, A. Y. & Vodchits, V. A., Feb 23 2006, EUV Sources for Lithography. SPIE, p. 477-504 28 p.

  Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review
  3 Scopus citations