Supporting Data for "Pitfalls in Parameters: Practical Process Development in Chemical Vapor Processing of SiC"

CALculation of PHAse Diagrams (CALPHAD) was used to produce equilibrium phase diagrams of the MTS/H2 system. These were calculated in FactSage 8.2 using a combination of the FactPS and SGTE Solutions 2022 databases. Equilibrium was calculated for 185 gas species, 36 pure liquids, 8 pure solids, 1 liquid solution, and 22 solid solutions. Phase diagrams were calculated with 25 °C steps in temperature from 700 to 1325 °C and 10 torr steps in pressure from 20 to 760 torr.